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The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method

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Abstract

In this study, ZrO2 coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO2 coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure.

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The data availability statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

References

  • Abd El-Latif, M.M., Showman, M.S., Ibrahim, A.M., Soliman, M.M.: Optimizing the preparation parameters of nanocrystalline zirconia for catalytic applications. Acta Metall. Sin. 26, 565–573 (2013). https://doi.org/10.1007/s40195-013-0008-0

    Article  Google Scholar 

  • Aghazadeh, M., Malek Barmi, A.A., Hosseinifard, M.: Nanoparticulates Zr(OH)4 and ZrO2 prepared by low-temperature cathodice lectrodeposition. Mater Lett. 73, 28–31 (2012). https://doi.org/10.1016/j.matlet.2011.12.118

    Article  Google Scholar 

  • Ahmadpourian, A., Arman, A., Elahi, S.M., Boochani, A., Solaymani, S., Zahrabi, H.: Effect of temperature on optimization of Zro2nanofiber produced by electrospinning method. J. Appl. Spectroscopy 81, 691–693 (2014)

    Article  ADS  Google Scholar 

  • Ahmadpourian, A., Luna, C., Boochani, A., Arman, A., Achour, A., Rezaee, S., Naderi, S.: The effects of deposition time on surface morphology, structural, electrical and optical properties of sputtered Ag-Cu thin films. Eur. Phys. J. plus. 131, 381 (2016). https://doi.org/10.1140/epjp/i2016-16381-2

    Article  Google Scholar 

  • Anitha, V.S., Sujatha Lekshmy, S., Joy, K.: Bandgap tuning of ZrO2-SnO2nanocomposite thin filmsby sol-gel dip coating technique. Mater. Today Proc. 2, 1026–1030 (2015)

    Article  Google Scholar 

  • Arena, A., Prete, F., Elisa Rambaldi, M., Chiara Bignozzi, C., Monaco, A.D., Fiore, J.C.: Nanostructured zirconia-based ceramics and composites in dentistry: a state-of-the-art review. Nanomaterials 9(10), 1393 (2019). https://doi.org/10.3390/nano9101393

    Article  Google Scholar 

  • Arman, A., Ţălu, Ş, Luna, C., Ahmadpourian, A., Naseri, M., Molamohammadi, M.: Micromorphology characterization of copper thin films by AFM and fractal analysis. J. Mater. Sci. Mater. Electron. 26, 9630–9639 (2015)

    Article  Google Scholar 

  • Astinchap, B., Gholami Laelabadi, K.: Effects of substrate temperature and precursor amount on optical properties and microstructure of CVD deposited amorphous TiO2 thin films. J. Phys. Chem. Solids 129, 217–226 (2019). https://doi.org/10.1016/j.jpcs.2019.01.012

    Article  ADS  Google Scholar 

  • Balakrishnan, G., Sairam, T.N., Kuppusami, P., Thiumurugesan, R., Mohandas, E., Ganesan, V., Sastikumar, D.: Influence ofoxygen partial pressure on the properties of pulsed laser deposited nanocrystalline zirconia thin films. Appl. Surf. Sci. 257, 8506 (2011)

    Article  ADS  Google Scholar 

  • Comini, E.: Metal oxide nano-crystals for gas sensing. Anal. Chim. Acta. 568(1–2), 28–40 (2006). https://doi.org/10.1016/j.aca.2005.10.069

    Article  Google Scholar 

  • Comini, E., Faglia, G., Ferroni, M., Ponzoni, A., Vomiero, A., Sberveglieri, G.: Metal oxide nanowires: preparation and application in gas sensing. J. Mol. Catal. A Chem. 305, 170 (2009). https://doi.org/10.1016/j.molcata.2009.01.009

    Article  Google Scholar 

  • Della Bona, A., Pecho, O.E., Alessandretti, R.: Zirconia as a dental biomaterial. Materials 8(8), 4978–4991 (2015). https://doi.org/10.3390/ma8084978

    Article  ADS  Google Scholar 

  • Desforges, J., Robichaud, L., Gauvin, S.: Determination of optical properties of thin films from ketteler helmholtz dispersion relations: application to the case of ultraviolet irradiated zirconium oxide. Adv. Mater. Sci. Eng. 828523 (2017)

  • Dong Zhou, W., Dastan, D., Li, J., Tao Yin, X., Wang, Q.: Discriminable sensing response behavior to homogeneous gases based on n-ZnO/p-NiO composites. Nanomaterials 10(4), 758 (2020). https://doi.org/10.3390/nano10040785

    Article  Google Scholar 

  • Fathinezhad, M., Abbasi Tarighat, M., Dastan, D.: Chemometrics heavy metal content clusters using electrochemical data of modified carbon paste electrode. Environ. Nanotechnol. Monit. Manag. 14, 100307 (2020)

    Google Scholar 

  • Furuta, S., Matsuhashi, H., Arata, K.: Biodiesel fuel production with solid amorphous-zirconia catalysis in fixed bed reactor. Biomass Bioenerg. 870, 30 (2006). https://doi.org/10.1016/j.biombioe.2005.10.010

    Article  Google Scholar 

  • Goharshadi, E.K., Hadadian, M.: Effect of calcination temperature on structural, vibrational, optical, and rheological properties of zirconia nanoparticles. Ceram. Int. 38(3), 1771–1777 (2012)

    Article  Google Scholar 

  • Grayeli Korpi, A.R., Rezaee, S., Luna, C., Ţălu, Ş, Arman, A., Ahmadpourian, A.: Influence of the oxygen partial pressure on the growth and optical properties of RF-sputtered anatase TiO2 thin films. Res. Phys. 7, 3349–3352 (2017). https://doi.org/10.1016/j.rinp.2017.08.018

    Article  Google Scholar 

  • Grech, J., Antunes, E.: Zirconia in dental prosthetics: a literature review. J. Market. Res. 8(5), 4956–4964 (2019)

    Google Scholar 

  • Hojabri, A.: Structural and optical characterization of ZrO2 thin films grown on silicon and quartz substrates. J. Theor. Appl. Phys. 10, 219–224 (2016). https://doi.org/10.1007/s40094-016-0218-8

    Article  ADS  Google Scholar 

  • ISO 25178–2: 2012, Geometrical product specifications (GPS) - Surface texture: Areal—Part 2: Terms, definitions and surface texture parameters. Available from: http://www.iso.org. Last accessed 28 Mar 2021

  • Jafari, A., Hosein Alam, M., Dastan, D., Ziakhodadadian, S., Shi, Z., Garmestani, H., Weidenbach, A.S., Ţălu, Ş: Statistical, morphological, and corrosion behavior of PECVD derived cobalt oxide thin films. J. Mater. Sci. Mater. Electron. 30, 21185–21198 (2019). https://doi.org/10.1007/s10854-019-02492-6

    Article  Google Scholar 

  • Jafari, A., Tahani, Kh., Dastan, D., Asgary, S., Shi, Zh., Yin, X.-T., Zhou, W.-D., Garmestani, H., Ţălu, Ş: Ion Implantation of Copper Oxide Thin Films; Statistical and Experimental Results. Surf. Interfaces 18, 100463 (2020)

    Article  Google Scholar 

  • Jonas, S., Januś, M., Jaglarz, J., Kyzioł, K.: Formation of SixNy(H) and C:N:H layers by plasma assisted chemical vapor deposition method. Thin Solid Films 600, 162–168 (2016)

    Article  ADS  Google Scholar 

  • Joy, K., Berlin, I.J., Nair, P.B., Lakshmi, J.S., Daniel, G.P., Thomas, P.V.: Effects of annealing temperature on the structuraland photoluminescence properties of nanocrystalline ZrO2 thin films prepared by sol–gel route. J. Phys. Chem. Solids 72, 673 (2011)

    Article  ADS  Google Scholar 

  • Kruschwitz, J.D.T., Pawlewicz, W.T.: Optical and durability properties of infrared transmitting thin films. Appl. Opt. 36, 2157–2159 (1997)

    Article  ADS  Google Scholar 

  • Luna, C., Ilyn, M., Vega, V., Prida, V.M., González, J., Mendoza-Reséndez, R.: Size distribution and frustrated antiferromagnetic coupling effects on the magnetic behavior of ultrafine akaganéite (β-FeOOH) nanoparticles. J. Phys. Chem. c. 118(36), 21128–21139 (2014). https://doi.org/10.1021/jp5048634

    Article  Google Scholar 

  • Mayerhöfer, T.G., Pahlow, S., Popp, J.: The Bouguer-Beer-Lambert law: shining light on the obscure. ChemPhysChem 21(18), 2029–2046 (2020). https://doi.org/10.1002/cphc.202000464

    Article  Google Scholar 

  • Panahi, S.L., Dastan, D., Chaure, N.B.: Characterization of zirconia nanoparticles grown by sol–gel method. Adv. Sci. Lett. 22(4), 941–944 (2016)

    Article  Google Scholar 

  • Patil, K.C., Hegde, M.S., Rattan, T., Aruna, S.T.: Chemistry of Nanocrystalline Oxide Materials. World Scientific Publishing Co. Pte. Ltd., Singapore (2008)

    Book  Google Scholar 

  • Pyen, S., Hong, E., Shin, M., Suh, Y.W., Shin, C.H.: Acidity of co-precipitated SiO2−ZrO2 mixed oxides in the acid-catalyzed dehydrations of iso-propanol and formic acid. Mol. Catal. 448, 71–77 (2018). https://doi.org/10.1016/j.mcat.2018.01.031

    Article  Google Scholar 

  • Rebib, F., Laidani, N., Gottardi, G., Micheli, V., Bartali, R., Jestin, Y., Tomasella, E., Ferrari, M., Thomas, L.: Investigation of structural and optical properties of sputtered zirconia thin films. Eur. Phys. J. Appl. Phys. 43, 363 (2008)

    Article  ADS  Google Scholar 

  • Rezaee, S., Arman, A., Jurečka, S., Grayeli Korpi, A., Mwema, F., Luna, C., Sobola, D., Kulesza, S., Shakoury, R., Bramowicz, M., Ahmadpourian, A.: Effect of annealing on the micromorphology and corrosion properties of Ti/SS thin films. Superlattice Microst 146, 106681 (2020). https://doi.org/10.1016/j.spmi.2020.106681

    Article  Google Scholar 

  • Shakoury, R., Grayeli Korpi, A., Ghosh, K., Ţălu, Ş, Rezaee, S., Mwema, F., Mardani, M., Arman, A.: Stereometric and scaling law analysis of surface morphology of stainless steel type AISI 304 coated with Mn: a conventional and fractal evaluation. Mater. Res. Exp. 6(11), 116436 (2019)

    Article  Google Scholar 

  • Shakoury, R., Arman, A., Ţălu, Ş, Dastan, D., Luna, C., Rezaee, S.: Stereometric analysis of TiO2 thin films deposited by electron beam ion assisted. Opt Quantum Electron 52, 1–12 (2020a). https://doi.org/10.1007/s11082-020-02388-4

    Article  Google Scholar 

  • Shakoury, R., Arman, A., Ţălu, Ş, Ghosh, K., Rezaee, S., Luna, C., Mwema, F., Sherafat, K., Salehi, M., Mardani, M.: Optical properties, microstructure, and multifractal analyses of ZnS thin films obtained by RF magnetron sputtering. J. Mater. Sci. Mater. Electron. 31(7), 5262–5273 (2020b). https://doi.org/10.1007/s10854-020-03086-3

    Article  Google Scholar 

  • Shan, K., Yi, Z., Yin, X., Dastan, D., Garmestani, H.: Conductivity and mixed conductivity of a novel dense diffusion barrier and sensing properties of limiting current oxygen sensors. Dalton Trans. 49, 6682–6692 (2020)

    Article  Google Scholar 

  • Shao, S., Fan, Z., Shao, J., He, H.: Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different temperatures and rates. Thin Solid Films 445, 62–59 (2003)

    Article  ADS  Google Scholar 

  • Shen, Y., Shao, S., Yu, H., Fan, Z., He, H., Shao, J.: Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposi-tion. Appl. Surf. Sci. 254, 552 (2007)

    Article  ADS  Google Scholar 

  • Smith, D., Baumeister, P.: Refractive index of some oxide and fluoride coating materials. Appl. Opt. 18, 111–115 (1979)

    Article  ADS  Google Scholar 

  • Stach, S., Sapota, W., Ţălu, Ş, Ahmadpourian, A., Luna, C., Ghobadi, N., Arman, A., Ganji, M.: 3D Surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures. J. Mater. Sci. Mater. Electron. 28(2), 2113–2122 (2017). https://doi.org/10.1007/s10854-016-5774-9

    Article  Google Scholar 

  • Sun, L., Shi, Z., Liang, L., Wei, S., Wang, H., Dastan, D., Sun, K., Fan, R.: Layer-structured BaTiO3/P(VDF-HFP) composites with concurrently improved dielectric permittivity and breakdown strength toward capacitive energy-storage applications. J. Mater. Chem. C 8, 10257–10265 (2020a)

    Article  Google Scholar 

  • Sun, L., Shi, Zh., Wang, H., Zhang, K., Dastan, D., Sun, K., Fan, R.: Ultrahigh discharge efficiency and improved energy density in rationally designed bilayer polyetherimide-BaTiO3/P(VDF-HFP) composites. J. Mater. Chem. A 8, 5750–5757 (2020b)

    Article  Google Scholar 

  • Swanepoel, R.: Optical properties and electronic structure of amorphous Ge and Si. J. Phps. E Sci. Instrum. 16, 1214 (1983). https://doi.org/10.1016/0025-5408(68)90023-8

    Article  ADS  Google Scholar 

  • Tahmasebpour, M., Babaluoa, A.A., Razavi Aghjeh, M.K.: Synthesis of zirconia nanopowders from various zirconiumsalts via polyacrylamide gel method. J. Eur. Ceramic Soc. 28, 773–778 (2008a). https://doi.org/10.1016/j.jeurceramsoc.2007.09.018

    Article  Google Scholar 

  • Ţălu, Ş: Micro and nanoscale characterization of three dimensional surfaces Basics and applications. Napoca Star Publishing House, Cluj-Napoca (2015)

    Google Scholar 

  • Ţălu, Ş, Stach, S., Mendez, A., Trejo, G., Talu, M.: Multifractal Characterization of nanostructure surfaces of electrodeposited Ni-P coatings. J. Electrochem. Soc. 161, D44–D47 (2013). https://doi.org/10.1149/2.039401jes

    Article  Google Scholar 

  • Ţălu, Ş, Bramowicz, M., Kulesza, S., Dalouji, V., Solaymani, S., Valedbagi, S.: Fractal features of carbon–nickel composite thin films. Microsc. Res. Tech. 79(12), 1208–1213 (2016). https://doi.org/10.1002/jemt.22779

    Article  Google Scholar 

  • Ţălu, Ş, Morozov, I.A., Yadav, R.P.: Multifractal analysis of sputtered indium tin oxide thin film surfaces. Appl Surf Sci. 484, 892–898 (2019). https://doi.org/10.1016/j.apsusc.2019.04.170

    Article  ADS  Google Scholar 

  • Tao, L., Huang, J., Dastan, D., Wang, T., Li, J., Yin, X., Wang, Q.: CO2 capture and separation on charge-modulated calcite. Appl. Surf. Sci. 530, 147265 (2020)

    Article  Google Scholar 

  • Tao, Y.X., Li, J., Dastan, D., Dong, Z.W., Garmestani, H., Alamgir, F.M.: Ultra-high selectivity of H2 over CO with a p-n nanojunction based gas sensors and its mechanism. Sensor Actuat: B. Chem. 319, 128330 (2020)

    Article  Google Scholar 

  • Tauc, J.: Optical properties and electronic structure of amorphous Ge and Si. Mater. Res. Bull. 3, 37–46 (1968). https://doi.org/10.1016/0025-5408(68)90023-8

    Article  Google Scholar 

  • Trolliard, G., Benmechta, R., Mercurio, D.: Pure orthorhombic zirconia islands grown on single-crystal sapphire substrates. Acta Mater. 55(17), 6011–6018 (2007). https://doi.org/10.1016/j.actamat.2007.07.009

    Article  ADS  Google Scholar 

  • Yin, X.-T., Lv, P., Li, J., Jafari, A., Wu, F.-Y., Wang, Q., Dastan, D., Shi, Zh., Yu, Sh., Garmestani, H.: Nanostructured tungsten trioxide prepared at various growth temperatures for sensing applications. J. Alloys Compd. 825, 154105 (2020)

    Article  Google Scholar 

  • Yusoh, R., Horprathum, M., Eiamchai, P., Chindaudom, P., Aiempanakit, K.: Determination of optical and physical properties of Zro2films by spectroscopic ellipsometry. Procedia Eng. 32, 745–751 (2012)

    Article  Google Scholar 

  • Zavarian, A.A., Țălu, Ș, Hafezi, F., Achour, A., Luna, C., Naderi, S., Mardani, M., Arman, A., Ahmadpourian, A.: Study of the microstructure and surface morphology of silver nanolayers obtained by ion-beam deposition. J. Mater. Sci. Mater. Electron. 28, 15293–15301 (2017). https://doi.org/10.1007/s10854-017-7410-8

    Article  Google Scholar 

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Acknowledgment

Azaheh Jafari acknowledges the Foundation for Polish Science financed by the European Union under the European Regional Development Fund (POIR.04.04.00-00-3ED8/17).

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Reza Shakoury: Conceptualization, optical measurements, supervision. Negin Talebani: Methodology and editing. Ali Arman: Investigation and writing. Amir Zelati: Investigation. Ştefan Ţălu: Stereometric and fractal analyses. Saeed Mirzaei: Editing. Azadeh Jafari: Editing.

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Shakoury, R., Talebani, N., Zelati, A. et al. The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method. Opt Quant Electron 53, 441 (2021). https://doi.org/10.1007/s11082-021-03079-4

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