Abstract
In the present study, the electrical parameters of the ZnO/Si heterojunction device fabricated via RF magnetron sputtering are examined in detail and the results are compared with literature. Structural and morphological analyses have been done to understand and expound device behavior and results of electrical studies. XRD analysis confirms the crystal formation of ZnO phase with (103) and (111) oriented, while AFM analysis shows that the film surface is homogeneous and the mean roughness is approximately as 2 nm. The carrier concentration and conductivity type of ZnO thin film were obtained by Hall Effect measurement as 5.56 × 1017 cm−3, n-type, respectively. The dark current–voltage and capacitance–voltage measurements were carried out to obtain the electrical parameters of the device. From the dark current–voltage measurement the ideality factor, barrier height, and series resistance were estimated as n = 2.16, Φb = 0.71 eV, and Rs = 92.5 Ω. The barrier height was also obtained by the capacitance–voltage measurement handled at room temperature. The results were compared with those obtained from similar or different production methods. Illumination current–voltage measurement was also performed to determine if the fabricated heterojunction device has photovoltaic properties.
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Agüero, N.M., Agarwal, V., Vidales, H.I.V., Alvarez, J.C., Sebastian, P.J.: A heterojunction based on macro-porous silicon and zinc oxide for solar cell application. J. New Mater. Electrochem. Syst. 18, 225–230 (2015)
Bedia, A., Bedia, F.Z., Benyoucef, B., Hamzaoui, S.: Electrical characteristics of Ultraviolet photodetector based on ZnO nanostructures. Phys. Proc. 55, 53–60 (2014)
Bu, I.Y.Y., Hu, T.H.: P-type ZnO films deposited by DC reactive magnetron sputtering using codoping process. J. Mater. Sci. Mater. Electron. 28, 2852–2858 (2017)
Chaabouni, F., Abaab, M., Rezig, B.: Characterization of n-ZnO/p-Si films grown by magnetron sputtering. Superlattices Microstruct. 39, 171–178 (2006)
Cheung, S.K., Cheung, N.W.: Extraction of Schottky diode parameters from forward current–voltage characteristics. Appl. Phys. Lett. 49, 85–87 (1986)
Coathup, D., Li, Z., Zhu, X., Ye, H.: The growth of non-c-axis-oriented ferroelectric BLT thin films on silicon using ZnO buffer layer. Mater. Lett. 206, 117–120 (2017)
Cullity, B.D.: Elements of X-ray diffraction, p. 149. Addison-Wesley, Reading (1978)
Hardan, N.H.A., Hamid, M.A.A., Ahmed, N.M., Shamsudin, R., Othman, N.K.: Ag/ZnO/p-Si/Ag heterojunction and their optoelectronic characteristics under different UV wavelength illumination. Sens. Actuators A 242, 50–57 (2016)
Janardhanam, V., Lee, H.K., Shim, K.H., Hong, H.B., Lee, S.H., Ahn, K.S., Choi, C.J.: Temperature dependency and carrier transport mechanisms of Ti/p-type InP Schottky rectifiers. J. Alloys Compd. 504, 146–150 (2010)
Jiao, Y., Yiling, J., Linjie, L., Meizhen, G.: Structural, morphological, optical and electrical properties of Ga-doped ZnO transparent conducting thin films. Appl. Surf. Sci. 421, 446–452 (2016)
Kaplan, H.K., Sarsıcı, S., Akay, S.K., Ahmetoglu, M.: The characteristics of ZnS/Si heterojunction diode fabricated by thermionic vacuum arc. J. Alloys Compd. 724, 543–548 (2017)
Keskenler, E.F., Tomakin, M., Doğan, S., Turgut, G., Aydın, S., Duman, S., Gürbulak, B.: Growth and characterization of Ag/n-ZnO/p-Si/Al heterojunction diode by sol–gel spin technique. J. Alloys Compd. 550, 129–132 (2013)
Klason, P., Rahman, M.M., Hu, Q.H., Nur, O., Turan, R., Willander, M.: Fabrication and characterization of p-Si/n-ZnO hetero structured junctions. Microelectron. J. 40, 706–710 (2009)
Lee, J.Y., Choi, Y.S., Kim, J.H., Park, M.O., Im, S.: Optimizing n-ZnO/p-Si hetero junctions for photodiode applications. Thin Solid Films 403–404, 553–557 (2002)
Lung, C., Toma, M., Pop, M., Marconi, D., Pop, A.: Characterization of the structural and optical properties of ZnO thin films doped with Ga, Al and (Al + Ga). J. Alloys Compd. 725, 1238–1243 (2017)
Muchuweni, E., Sathiaraj, T.S., Nyakotyo, H.: Hydrothermal synthesis of ZnO nanowires on rf sputtered Ga and Al co-doped ZnO thin films for solar cell application. J. Alloys Compd. 721, 45–54 (2017)
Pathak, T.K., Kumar, V., Prakash, J., Purohit, L.P., Swart, H.C., Kroon, R.E.: Fabrication and characterization of nitrogen doped p-ZnO on n-Si heterojunctions. Sens. Actuators A 247, 475–478 (2016)
Pietruszka, R., Luka, G., Witkowski, B.S., Kopalko, K., et al.: Electrical and photovoltaic properties of ZnO/Si hetero structures with ZnO films grown by atomic layer deposition. Thin Solid Films 563, 28–31 (2014)
Rakhshani, A.E.: Optoelectronic properties of p-n and p-i-n heterojunction devices prepared by electro deposition of n-ZnO on p-Si. J. Appl. Phys. 108, 094502 (2010). https://doi.org/10.1063/1.3490622
Rhoederick, E.H., Williams, R.H.: Metal-Semiconductor Contacts, p. 54. Oxford University Press, Oxford (1988)
Sharma, S., Bayer, B.C., Skakalova, V., et al.: Structural, electrical, and UV detection properties of ZnO/Si heterojunction diodes. IEEE. Trans. Electron. Dev. 63, 1949–1956 (2016)
Shewale, P.S., Lee, S.H., Yu, Y.S.: Pulse repetition rate dependent structural, surface morphological and optoelectronic properties of Ga-doped ZnO thin films grown by pulsed laser deposition. J. Alloys Compd. 725, 1106–1114 (2017)
Sze, S.M.: Semiconductor Devices, 2nd edn, p. 101. Wiley, New York (2002)
Wen, X., He, Y., Chen, C., et al.: Magnetron sputtered ZnO buffer layer for Sb2Se3 thin film solar cells. Sol. Energy Mater. Sol. Cells 172, 74–81 (2017)
Zebbar, N., Kheireddine, Y., Mokeddem, K., Hafdallah, A., et al.: Structural, optical and electrical properties of n-ZnO/p-Si heterojunction prepared by ultrasonic spray. Mater. Sci. Semicond. Proc. 14, 229–234 (2011)
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Akay, S.K., Sarsıcı, S. & Kaplan, H.K. Determination of electrical parameters of ZnO/Si heterojunction device fabricated by RF magnetron sputtering. Opt Quant Electron 50, 362 (2018). https://doi.org/10.1007/s11082-018-1635-5
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DOI: https://doi.org/10.1007/s11082-018-1635-5