Abstract
Ultrashort laser pulse interaction with the surface of silicon wafer in air and water environments is investigated. Ti:sapphire laser with 40 femtosecond laser pulses at 790 nm and 10 Hz repetition rate was used. The ablation threshold of the silicon surface in the air was determined to be about 0.28 J cm−2. The surface morphology was studied by using scanning electron microscope images. The size of the regular ripples formed in the air environment is a little smaller than the laser wavelength. Due to the nonlinear interaction and self-focusing before the target, the ripples size reduced to nearly a half of the laser wavelength in the water. Moreover, the spikes’ structure formation and their diameter in air and water were studied. Two regimes for spike formation in water are proposed that can explain the anomalous decrease of the spikes’ diameter in higher fluence. During the interaction of single linearly polarized femtosecond laser pulse with the surface, an irregular ripple formation that called circular ripple is observed. This structure which is a result of radiation pressure implies to the surface by the end of the pulse. A new physical model for interpretation of the circular ripples formation based on the ponderomotive force of an ultrashort pulse laser is proposed which can predict the size of the circular ripples. The calculated results are in accordance with our experimental findings.
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Albu, C., Dinescu, A., Filipescu, M., Ulmeanu, M., Zamfirescu, M.: Periodical structures induced by femtosecond laser on metals in air and liquid environments. Appl. Surf. Sci. 278, 347–351 (2013). https://doi.org/10.1016/J.APSUSC.2012.11.075
Barcikowski, S., Hahn, A., Kabashin, A.V., Chichkov, B.N.: Properties of nanoparticles generated during femtosecond laser machining in air and water. Appl. Phys. A 87, 47–55 (2007). https://doi.org/10.1007/s00339-006-3852-1
Barnes, W.L.: Surface plasmon–polariton length scales: a route to sub-wavelength optics. J. Opt. A: Pure Appl. Opt. 8, S87–S93 (2006)
Besner, S., Degorce, J.Y., Kabashin, A. V, Meunier, M.: Surface modifications during femtosecond laser ablation in vacuum, air and water. In: Proceedings of SPIE Vol. p. 555 (2004)
Bonse, J., Baudach, S., Krüger, J., Kautek, W., Lenzner, M.: Femtosecond laser ablation of silicon–modification thresholds and morphology. Appl. Phys. A Mater. Sci. Process. 74, 19–25 (2002)
Chichkov, B.N., Momma, C., Nolte, S., Von Alvensleben, F., Tünnermann, A.: Femtosecond, picosecond and nanosecond laser ablation of solids. Appl. Phys. A 63, 109–115 (1996)
Daminelli, G., Krüger, J., Kautek, W.: Femtosecond laser interaction with silicon under water confinement. Thin Solid Films 467, 334–341 (2004)
Derrien, T.J.-Y., Itina, T.E., Torres, R., Sarnet, T., Sentis, M.: Possible surface plasmon polariton excitation under femtosecond laser irradiation of silicon. J. Appl. Phys. 114, 083104 (2013)
Derrien, T.-Y., Koter, R., Krüger, J., Höhm, S., Rosenfeld, A., Bonse, J.: Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water. J. Appl. Phys. 116, 074902 (2014)
Emel’yanov, V.I., Danilov, P.A., Zayarnyi, D.A., Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Rudenko, A.A., Shikunov, D.I., Yurovskikh, V.I.: Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface. JETP Lett. 100, 145–149 (2014). https://doi.org/10.1134/s0021364014150053
Etsion, I.: State of the art in laser surface texturing. Trans. ASME-F-J. Tribol. 127, 248–253 (2005)
Gamaly, E.G., Rode, A.V., Luther-Davies, B., Tikhonchuk, V.T.: Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics. Phys. Plasmas 9, 949–957 (2002). https://doi.org/10.1063/1.1447555
Gurevich, E.L.: On the influence of surface plasmon–polariton waves on pattern formation upon laser ablation. Appl. Surf. Sci. 278, 52–56 (2013). https://doi.org/10.1016/J.APSUSC.2013.01.103
Halbwax, M., Sarnet, T., Delaporte, P., Sentis, M., Etienne, H., Torregrosa, F., Vervisch, V., Perichaud, I., Martinuzzi, S.: Micro and nano-structuration of silicon by femtosecond laser: application to silicon photovoltaic cells fabrication. Thin Solid Films 516, 6791–6795 (2008)
Her, T.-H., Finlay, R.J., Wu, C., Deliwala, S., Mazur, E.: Microstructuring of silicon with femtosecond laser pulses. Appl. Phys. Lett. 73, 1673–1675 (1998)
Her, T.-H., Finlay, R.J., Wu, C., Mazur, E.: Femtosecond laser-induced formation of spikes on silicon. Appl. Phys. A Mater. Sci. Process. 70, 383–385 (2000)
Ionin, A.A., Kudryashov, S.I., Seleznev, L.V., Sinitsyn, D.V., Bunkin, A.F., Lednev, V.N., Pershin, S.M.: Thermal melting and ablation of silicon by femtosecond laser radiation. J. Exp. Theor. Phys. 116, 347–362 (2013). https://doi.org/10.1134/S106377611302012X
Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Rudenko, A.A., Seleznev, L.V., Sinitsyn, D.V., Golosov, E.V., Kolobov, Y.R., Ligachev, A.E.: “Heterogeneous” versus “homogeneous” nucleation and growth of microcones on titanium surface under UV femtosecond-laser irradiation. Appl. Phys. A 116, 1133–1139 (2014a). https://doi.org/10.1007/s00339-013-8196-z
Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Rudenko, A.A., Saltuganov, P.N., Seleznev, L.V., Sinitsyn, D.V., Sunchugasheva, E.S.: Femtosecond laser fabrication of sub-diffraction nanoripples on wet Al surface in multi-filamentation regime: high optical harmonics effects? Appl. Surf. Sci. 292, 678–681 (2014b). https://doi.org/10.1016/j.apsusc.2013.12.032
Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Rudenko, A.A., Seleznev, L.V., Sinitsyn, D.V., Emel’yanov, V.I.: Nonlinear optical dynamics during femtosecond laser nanostructuring of a silicon surface. Laser Phys. Lett. 12, 025902 (2015). https://doi.org/10.1088/1612-2011/12/2/025902
Ionin, A.A., Kudryashov, S.I., Rudenko, A.A., Seleznev, L.V., Sinitsyn, D.V., Makarov, S.V.: Nonlinear optical feedback for nano- and micropatterning of silicon surface under femtosecond laser irradiation. Opt. Mater. Express 7, 2793–2807 (2017). https://doi.org/10.1364/OME.7.002793
Kudryashov, S.I., Saraeva, I.N., Lednev, V.N., Pershin, S.M., Rudenko, A.A., Ionin, A.A.: Single-shot femtosecond laser ablation of gold surface in air and isopropyl alcohol. Appl. Phys. Lett. 112, 203101 (2018). https://doi.org/10.1063/1.5026591
Liu, X., Du, D., Mourou, G.: Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quantum Electron. 33, 1706–1716 (1997). https://doi.org/10.1109/3.631270
Liu, W., Kosareva, O., Golubtsov, I.S., Iwasaki, A., Becker, A., Kandidov, V.P., Chin, S.L.: Femtosecond laser pulse filamentation versus optical breakdown in H2O. Appl. Phys. B Lasers Opt. 76, 215–229 (2003)
Liu, H., Chen, F., Wang, X., Yang, Q., Bian, H., Si, J., Hou, X.: Influence of liquid environments on femtosecond laser ablation of silicon. Thin Solid Films 518, 5188–5194 (2010)
Macchi, A.: A Superintense Laser-Plasma Interaction Theory Primer. Springer, Dordrecht (2013)
Maragkaki, S., Derrien, T.J.-Y., Levy, Y., Bulgakova, N.M., Ostendorf, A., Gurevich, E.L.: Wavelength dependence of picosecond laser-induced periodic surface structures on copper. Appl. Surf. Sci. 417, 88–92 (2017a). https://doi.org/10.1016/j.apsusc.2017.02.068
Maragkaki, S., Elkalash, A., Gurevich, E.L.: Orientation of ripples induced by ultrafast laser pulses on copper in different liquids. Appl. Phys. A 123, 721 (2017b). https://doi.org/10.1007/s00339-017-1336-0
Mizeikis, V., Juodkazis, S., Ye, J.-Y., Rode, A., Matsuo, S., Misawa, H.: Silicon surface processing techniques for micro-systems fabrication. Thin Solid Films 438, 445–451 (2003)
Nibbering, E.T.J., Grillon, G., Franco, M.A., Prade, B.S., Mysyrowicz, A.: Determination of the inertial contribution to the nonlinear refractive index of air, N2, and O2 by use of unfocused high-intensity femtosecond laser pulses. JOSA B 14, 650–660 (1997)
Obara, G., Tanaka, Y., Nedyalkov, N.N., Terakawa, M., Obara, M.: Direct observation of surface plasmon far field for regular surface ripple formation by femtosecond laser pulse irradiation of gold nanostructures on silicon substrates. Appl. Phys. Lett. 99, 61106 (2011). https://doi.org/10.1063/1.3624925
Ouyang, J., Perrie, W., Allegre, O.J., Heil, T., Jin, Y., Fearon, E., Eckford, D., Edwardson, S.P., Dearden, G.: Tailored optical vector fields for ultrashort-pulse laser induced complex surface plasmon structuring. Opt. Express 23, 12562–12572 (2015). https://doi.org/10.1364/OE.23.012562
Phillips, K.C., Gandhi, H.H., Mazur, E., Sundaram, S.K.: Ultrafast laser processing of materials: a review. Adv. Opt. Photonics 7, 684–712 (2015)
Sedao, X., Shugaev, M.V., Wu, C., Douillard, T., Esnouf, C., Maurice, C., Reynaud, S., Pigeon, F., Garrelie, F., Zhigilei, L.V., Colombier, J.-P.: Growth twinning and generation of high-frequency surface nanostructures in ultrafast laser-induced transient melting and resolidification. ACS Nano 10, 6995–7007 (2016). https://doi.org/10.1021/acsnano.6b02970
Shen, M.Y., Crouch, C.H., Carey, J.E., Mazur, E.: Femtosecond laser-induced formation of submicrometer spikes on silicon in water. Appl. Phys. Lett. 85, 5694–5696 (2004). https://doi.org/10.1063/1.1828575
Sipe, J.E., Young, J.F., Preston, J.S., Van Driel, H.M.: Laser-induced periodic surface structure. I. Theory Phys. Rev. B 27, 1141–1154 (1983)
Sokolowski-Tinten, K., Bialkowski, J., Cavalleri, A., von der Linde, D., Oparin, A., Meyer-ter-Vehn, J., Anisimov, S.I.: Transient states of matter during short pulse laser ablation. Phys. Rev. Lett. 81, 224–227 (1998). https://doi.org/10.1103/PhysRevLett.81.224
Stratakis, E., Zorba, V., Barberoglou, M., Fotakis, C., Shafeev, G.A.: Femtosecond laser writing of nanostructures on bulk Al via its ablation in air and liquids. Appl. Surf. Sci. 255, 5346–5350 (2009). https://doi.org/10.1016/J.APSUSC.2008.07.183
Sugioka, K., Cheng, Y.: Ultrafast lasers–reliable tools for advanced materials processing. Light Sci. Appl. 3, e149 (2014)
Wee, L.M., Ng, E.Y.K., Prathama, A.H., Zheng, H.: Micro-machining of silicon wafer in air and under water. Opt. Laser Technol. 43, 62–71 (2011). https://doi.org/10.1016/J.OPTLASTEC.2010.05.005
Yang, J., Luo, F., Kao, T.S., Li, X., Ho, G.W., Teng, J., Luo, X., Hong, M.: Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing. Light Sci. Appl. 3, e185 (2014)
Ye, S., Cao, Q., Wang, Q., Wang, T., Peng, Q.: A highly efficient, stable, durable, and recyclable filter fabricated by femtosecond laser drilling of a titanium foil for oil-water separation. Sci. Rep. 6, 37591 (2016)
Zalyubovskiy, S.J., Bogdanova, M., Deinega, A., Lozovik, Y., Pris, A.D., An, K.H., Hall, W.P., Potyrailo, R.A.: Theoretical limit of localized surface plasmon resonance sensitivity to local refractive index change and its comparison to conventional surface plasmon resonance sensor. JOSA A. 29, 994–1002 (2012)
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Goodarzi, R., Hajiesmaeilbaigi, F. Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments. Opt Quant Electron 50, 299 (2018). https://doi.org/10.1007/s11082-018-1562-5
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DOI: https://doi.org/10.1007/s11082-018-1562-5