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Polarization and p-type doping effects on photoresponse of separate absorption and multiplication AlGaN solar-blind avalanche photodiodes

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Abstract

The photoresponse characteristics of separate absorption and multiplication (SAM) AlGaN solar-blind avalanche photodiodes (APDs) were investigated in detail. The p-i-n-i-n avalanche photodiodes were examined using the newly designed model of avalanche photodiodes in AlGaN. The research results showed that the dark current density was about 3.51 × 10−8 A/cm2, the light current density was 5.86 × 10−5 A/cm2 under near-zero bias, and the avalanche breakdown occurred at about 135.0 V under reverse bias, which were all consistent with the experimental data. To investigate the effects influencing the photoresponse characteristics of the APDs, their photo responsivity spectra under different biases were simulated. The APD featured a window region over the wavelength range from 260 to 280 nm with a high rejection ratio on the short-wavelength side. Meanwhile, the dependence of APD responsivity on the polarization charge revealed that the negative polarization charges strongly affected the responsivity. Increased negative polarization charges at the Al0.4Ga0.6N/Al0.6Ga0.4N interface markedly lowered the responsivity, whereas charges of the same polarity at the GaN/Al0.4Ga0.6N interface enhanced the responsivity. Furthermore, the dependence of responsivity on p-type doping was analyzed by comparison with the effects of negative polarization charges on the conduction band of the APDs. Finally, the inversion layer models are used to interpret the effects of these on the APD responsivity. This research is useful for exploring polarization and p-type doping effects in SAM AlGaN structures and realization of high responsivity solar-blind APDs.

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References

  • Ambacher, O., Foutz, B., Smart, J.: Two dimensional electron gases induced by spontaneous and piezoelectric polarization in undoped and doped AlGaN/GaN heterostructures. J. Appl. Phys. 87(1), 334–344 (2000)

    Article  ADS  Google Scholar 

  • Chynoweth, A.G.: Ionization rates for electrons and holes in silicon. Phys. Rev. 109(5), 1537–1540 (1958)

    Article  ADS  Google Scholar 

  • Cicek, E., Vashaei, Z., McClintock, R., Bayram, C., Razeghi, M.: Geiger-mode operation of ultraviolet avalanche photodiodes grown on sapphire and free-standing GaN substrates. Appl. Phys. Lett. 96(26), 261107 (2010)

    Article  ADS  Google Scholar 

  • Cicek, E., Mcclintock, R., Vashaei, Z., Zhang, Y., Gautier, S., Cho, C.Y., Razeghia, M.: Crack-free AlGaN for solar-blind focal plane arrays through reduced area epitaxy. Appl. Phys. Lett. 102(5), 051102 (2013)

    Article  ADS  Google Scholar 

  • Gao, L.L.: Investigation of back-illuminated AlGaN avalanche photodiodes with p-type graded Al x Ga1−xN layer. Opt. Quant. Electron. 47(7), 1933–1940 (2015)

    Article  Google Scholar 

  • Hu, W.D., Chen, X.S., Yin, F., Zhang, J.B., Lu, W.: Two-dimensional transient simulations of drain lag and current collapse in GaN-based high-electron-mobility transistors. J. Appl. Phys. 105(8), 2169 (2009)

    Google Scholar 

  • Huang, Y., Chen, D.J., Lu, H., Dong, K.X., Zhang, R., Zheng, Y.D., Li, L., Li, Z.H.: Back-illuminated separate absorption and multiplication AlGaN solar-blind avalanche photodiodes. Appl. Phys. Lett. 101(25), 253516 (2012)

    Article  ADS  Google Scholar 

  • Huang, Z.Q., Li, J.F., Zhang, W.L., Jiang, H.: AlGaN solar-blind avalanche photodiodes with enhanced multiplication gain using back-illuminated structure. Appl. Phys. Express 6(5), 054101 (2013)

    Article  ADS  Google Scholar 

  • Hurkx, G.A.M., Klaassen, D.B.M., Knuvers, M.P.G.: A new recombination model for device simulation including tunneling. IEEE Trans. Electron Devices 39(2), 331–338 (2002)

    Article  ADS  Google Scholar 

  • Levinshtein, M.E., Rumyantsev, S.L., Shur, M.: Properties of advanced semiconductor materials: GaN, AlN, InN, BN, SiC, SiGe. Wiley, New York (2008)

    Google Scholar 

  • Lim, S.H., Yu, E.T.: Ultraviolet and solar-blind spectral imaging with subwavelength transmission gratings. Appl. Phys. Lett. 95(16), 161107 (2009)

    Article  ADS  Google Scholar 

  • Malinowski, P.E., John, J., Duboz, J.Y., Hellings, G., Lorenz, A., Gabriel, J., Madrid, R., Sturdevant, C., Cheng, K., Leys, M.: Backside-illuminated GaN-on-Si schottky photodiodes for UV radiation detection. IEEE Electron Device Lett. 30(12), 1308–1310 (2009)

    Article  ADS  Google Scholar 

  • Marino, F.A., Cullen, D.A., Smith, D.J., McCartney, M.R., Saraniti, M.: Simulation of polarization charge on AlGaN/GaN high electron mobility transistors: comparison to electron holography. J. Appl. Phys. 107(5), 054516 (2010)

    Article  ADS  Google Scholar 

  • Muth, J.F., Lee, J.H., Shmagin, I.K., Kolbas, R.M., Casey, H.C., Keller, B.P., Mishra, U.K., DenBaars, S.P.: Absorption coefficient, energy gap, exciton binding energy, and recombination lifetime of GaN obtained from transmission measurements. Appl. Phys. Lett. 71(18), 2572–2574 (1997)

    Article  ADS  Google Scholar 

  • Pau, J.L., Bayram, C., McClintock, R., Razeghi, M., Silversmith, D.: Back-illuminated separate absorption and multiplication GaN avalanche photodiodes. Appl. Phys. Lett. 92(10), 101120 (2008)

    Article  ADS  Google Scholar 

  • Phlyakov, V.M., Cimalla, V., Lebedev, V., Kohler, K., Muller, S., Waltereit, P., Ambacher, O.: Impact of Al content on transport properties of two-dimensional electron gas in GaN/Al x Ga1−xN/GaN heterostructures. Appl. Phys. Lett. 97(14), 142112 (2010)

    Article  Google Scholar 

  • Piprek, J.: Nitride semiconductor devices: principles and simulation. Wiley-VCH, Berlin (2007)

    Book  Google Scholar 

  • Shao, Z.G., Chen, D.J., Lu, H., Zhang, R., Cao, D.P., Luo, W.J., Zheng, Y.D., Li, L., Li, Z.H.: High gain AlGaN Solar-blind avalanche photodiodes. IEEE Electron Device Lett. 35(3), 372–374 (2014)

    Article  ADS  Google Scholar 

  • Srour, H., Salvestrini, J.P., Ahaitouf, A., Gautier, S., Moudakir, T., Assouar, B., Abarkan, M., Hamady, S., Ougazzaden, A.: Solar blind metal-semiconductor-metal ultraviolet photodetectors using quasi-alloy of BGaN/GaN superlattices. Appl. Phys. Lett. 99(22), 221101 (2011)

    Article  ADS  Google Scholar 

  • Sun, L., Chen, J.L., Li, J.F., Jiang, H.: AlGaN solar-blind avalanche photodiodes with high multiplication gain. Appl. Phys. Lett. 97(19), 191103 (2010)

    Article  ADS  Google Scholar 

  • Takeuchi, K., Adachi, S., Ohtsuka, K.: Optical properties of Al x Ga1−xN alloy. J. Appl. Phys. 107(2), 023306 (2010)

    Article  Google Scholar 

  • Wang, X.D., Hu, W.D., Chen, X.S., Xu, J.T., Wang, L., Li, X.Y., Lu, W.: Dependence of dark current and photoresponse characteristics on polarization charge density for GaN-based avalanche photodiodes. J. Phys. D Appl. Phys. 44(6), 405102 (2011)

    Article  Google Scholar 

  • Wang, X.D., Hu, W.D., Chen, X.S., Xu. J.T., Wang, L., Li, X.Y., Lu, W.: Electro-optical characteristics for AlGaN solar-blind p–i–n photodiode: Experiment and simulation. In: International conference on numerical simulation of optoelectronic devices, pp. 33–34 (2012)

  • Wang, X.D., Hu, W.D., Pan, M., Hou, L.W., Xie, W., Xu, J.T., Li, X.Y., Chen, X.S., Lu, W.: Study of gain and photoresponse characteristics for back-illuminated separate absorption and multiplication GaN avalanche photodiodes. J. Appl. Phys. 115(1), 013103 (2014)

    Article  ADS  Google Scholar 

  • Wang, X.D., Chen, X.S., Hou, L.W., Wang, B.B., Xie, W., Pan, M.: Role of n-type AlGaN layer in photoresponse mechanism for separate absorption and multiplication (SAM) GaN/AlGaN avalanche photodiode. Opt. Quant. Electron. 47(6), 1357–1365 (2015)

    Article  Google Scholar 

  • Wu, H.L., Wu, W.C., Zhang, H.X., Chen, Y.D., Wu, Z.S., Wang, G., Jiang, H.: All AlGaN epitaxial structure solar-blind avalanche photodiodes with high efficiency and high gain. Appl. Phys. Express 9(5), 052103 (2016)

    Article  ADS  Google Scholar 

  • Yao, C.J., Ye, X.C., Sun, R., Yang, G.F., Wang, J.: High-performance AlGaN-based solar-blind avalanche photodiodes with dual-periodic III–nitride distributed Bragg reflectors. Appl. Phys. Express 10(3), 034302 (2017)

    Article  ADS  Google Scholar 

  • Zhang, Y.P., Zhang, Z.H., Tan, S.T., Hernandez-Martinez, P.L., Zhu, B.B., Lu, S.P., Kang, X.J., Sun, X.W., Demir, H.V.: Investigation of p-type depletion doping for InGaN/GaN-based light-emitting diodes. Appl. Phys. Lett. 110(3), 033506 (2017)

    Article  ADS  Google Scholar 

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 11574166), China Scholarship Council (Grant No. 201708320105), Natural Science Foundation of the Higher Education Institutions of Jiangsu Province (Grant No. 14KJA510005), and Top-notch Academic Programs Project of Jiangsu Higher Education Institutions (Grant No. PPZY2015B135). We thank Natasha Lundin, Ph.D., from Liwen Bianji, Edanz Editing China (www.liwenbianji.cn/ac), for editing the English text of a draft of this manuscript.

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Correspondence to C. H. Yu or X. Y. Chen.

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Yu, C.H., Ge, Z.F., Chen, X.Y. et al. Polarization and p-type doping effects on photoresponse of separate absorption and multiplication AlGaN solar-blind avalanche photodiodes. Opt Quant Electron 50, 113 (2018). https://doi.org/10.1007/s11082-018-1385-4

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