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Room temperature deposition of ZnO and Al:ZnO ultrathin films on glass and PET substrates by DC sputtering technique


In the present work, ultrathin films of Zinc oxide (ZnO) and Aluminum doped zinc oxide (AZO) with 20 nm thick were fabricated at 300 K on glass and Polyethylene terephthalate (PET) substrates by means of direct-current sputtering method. The structural morphology of the films were analyzed by (XRD) diffractometry. The average transmittance of films deposited on different substrates showed high transparency (over 80%) in the visible spectrum. The objective of the present work is to investigate the thicknesses and optical constants of ZnO and AZO ultrathin films prepared by DC sputtering onto (glass and PET) substrates using two methods (UV–Vis–NIR spectrophotometer and ellipsometer (SE) by new amorphous dispersion formula) with comparison to check and confirm the results that obtained from UV with those obtained from SE measurements. The optical constants of films were extracted and compared using UV and SE techniques in the range of (200–2200 nm) with increment of 1 nm in order to confirm the accuracy of the UV and shown an excellent agreement.

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Authors are grateful to Nicolas Mercier, Magali Allain for providing the necessary facilities for XRD studies, Also, to Jean-Paul Gaston and Celine Eypert from Jobin–Yvon Horiba Company for the spectroscopic ellipsometry measurements and to Cecile Mézière, Valerie BONNIN for help with the chemicals and corresponding equipment.

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Correspondence to Mohammed Rasheed.

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Rasheed, M., Barillé, R. Room temperature deposition of ZnO and Al:ZnO ultrathin films on glass and PET substrates by DC sputtering technique. Opt Quant Electron 49, 190 (2017).

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  • ZnO and AZO thin films
  • Direct current sputtering
  • Glass and PET substrate
  • Spectrophotometry
  • Ellipsometry