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Laser irradiation of 10×(Ni/Ti)/Si multilayers at different wavelengths

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Abstract

A study of the effects of laser irradiation on the morphology and composition of Ni/Ti multilayers induced by nanosecond laser pulses at different wavelengths is reported. Irradiation of complex 10×(Ni/Ti)/Si sample was done by a Nd:YAG laser which operate at a 1064 nm wavelength, frequency doubled wavelength (532 nm) and dual-wavelength (1064 and 532 nm). The following surface morphological changes were observed: (1) ablation of the thin film during the first laser pulse and (2) appearance of some nanostructures (mosaic structure) in the irradiated region. After action of one pulse, the boundary of damage area was relatively sharp at low pulse energy, whereas it was diffuse after irradiation with higher energy per pulse. The results obtained show that laser irradiation induced mixing between Ni and Ti layers which creates conditions for the formation of intermetallic compounds. A numerical model was used to predict ablation depths and temperatures inside the material during the time. The model prediction shows a close agreement with experimental data.

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References

  • Bauerle, D.: Laser Processing and Chemistry. Springer, Berlin (2011)

    Book  Google Scholar 

  • Bhatt, P., Ganeshan, V., Reddy, V.R., Chaudhari, S.M.: High temperature annealing effect on structural and magnetic properties of Ti/Ni multilayers. Appl. Surf. Sci. 253, 2572–2580 (2006)

    Article  ADS  Google Scholar 

  • Bulgakova, N.M., Bulgakov, A.V., Babich, L.P.: Energy balance of pulsed laser ablation: thermal model revised. Appl. Phys. A 79, 1323–1326 (2004)

    ADS  Google Scholar 

  • Bulgakova, N.M., Zhukov, V.P., Collins, A.R., Rostohar, D., Derrien, T.J.-Y., Mocek, T.: How to optimize ultrashort pulse laser interaction with glass surfaces in cutting regimes? Appl. Surf. Sci. 336, 364–374 (2015)

    Article  ADS  Google Scholar 

  • Cho, H., Kim, H.Y., Miyazaki, S.: Alloying process of sputter-deposited Ti/Ni multilayer thin films. Mater. Sci. Eng. A 438–440, 699–702 (2006)

    Article  Google Scholar 

  • Makino, E., Mitsuya, T., Shibata, T.: Fabrication of TiNi shape memory micropump. Sens Actuators A 88, 256–262 (2001)

    Article  Google Scholar 

  • Petrović, S., Radak, B., Peruško, D., Pelicon, P., Kovač, J., Mitrić, M., Gaković, B., Trtica, M.: Laser-induced surface alloying in nanosized Ni/Ti multilayer structures. Appl. Surf. Sci. 264, 273–279 (2013)

    Article  ADS  Google Scholar 

  • Porneala, C., Willis, D.A.: Effect of the dielectric transition on laser-induced phase explosion in metals. Int. J. Heat Mass Transf. 49, 1928–1936 (2006)

    Article  MATH  Google Scholar 

  • Ramos, A.S., Calinas, R., Vieira, M.T.: The formation of γ-TiAl from Ti/Al multilayers with different periods. Surf. Coat. Technol. 200, 6196–6200 (2006)

    Article  Google Scholar 

  • Salatić, B., Petrović, S., Peruško, D., Čekada, M., Panjan, P., Pantelić, D., Jelenković, B.: Single- and dual-wavelength laser pulses induced modification in 10×(Al/Ti)/Si multilayer system. Appl. Surf. Sci. 360, 559–565 (2016)

    Article  ADS  Google Scholar 

  • Sproul, W.D.: New routes in the preparation of mechanically hard films. Science 273, 889–892 (1996)

    Article  ADS  Google Scholar 

  • Stafe, M.: Theoretical photo-thermo-hydrodynamic approach to the laser ablation of metals. J. Appl. Phys. 112, 123112 (2012)

    Article  ADS  Google Scholar 

  • Zhang, J., Sugioka, K., Takahashi, T., Toyoda, K., Midorikawa, K.: Dual-beam ablation of fused silica by multiwavelength excitation process using KrF excimer and F2 lasers. Appl. Phys. A 71, 23–26 (2000)

    ADS  Google Scholar 

  • Zoppel, S., Merz, R., Zehetner, J., Reider, G.A.: Enhancement of laser ablation yield by two color excitation. Appl. Phys. A 81, 847–850 (2005)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

The research was sponsored by the Ministry of Education, Science and Technological Development of the Republic Serbia through projects No. III 45016 and No. OI 171038. We also acknowledge the support from European Community, COST Action. Project No. MP1203, “Advanced X-ray spatial and temporal metrology”.

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Authors and Affiliations

  1. Institute of Physics Belgrade, University of Belgrade, Pregrevica 118, Belgrade, 11080, Serbia

    B. Salatić, B. Jelenković & D. Pantelić

  2. Institute of Nuclear Science - Vinča, University of Belgrade, P.O.B. 522, Belgrade, 11001, Serbia

    S. Petrović & D. Peruško

  3. Jožef Stefan Institute, Jamova 39, Ljubljana, 1000, Slovenia

    M. Čekada

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  1. B. Salatić
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  2. S. Petrović
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  3. D. Peruško
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  4. M. Čekada
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  5. B. Jelenković
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  6. D. Pantelić
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Correspondence to B. Salatić.

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This article is part of the Topical Collection on Advances in the science of light.

Guest Edited by Jelena Radovanovic, Milutin Stepić, Mikhail Sumetsky, Mauro Pereira and Dragan Indjin.

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Salatić, B., Petrović, S., Peruško, D. et al. Laser irradiation of 10×(Ni/Ti)/Si multilayers at different wavelengths. Opt Quant Electron 48, 314 (2016). https://doi.org/10.1007/s11082-016-0503-4

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  • DOI: https://doi.org/10.1007/s11082-016-0503-4

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