Abstract
In this work, a UV photodetector was fabricated by depositing 25 nm nickel oxide nanoparticles on an n-type silicon substrate by a closed-field unbalanced dual magnetron sputtering technique. The fabricated photodetector showed maximum spectral responsivity of 4.8 mA/W at 318 nm with maximum quantum efficiency of 1.87 %. This is good attempt to produce such nanostructures with high quality and low cost for UV detection application.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Balu, A.R., et al.: Nanocrystalline NiO thin films prepared by a low cost simplified spray technique using perfume atomizer. J. Electron Devices 13, 920–930 (2012)
Ezema, F.I., Ekwealor, A.B.C., Osuji, R.U.: Optical properties of chemical bath deposited nickel oxide (NiOx) thin films. Superficies y Vacío 21(1), 6–10 (2008)
Ganachari, S.V., et al.: Synthesis and characterization of nickel oxide nanoparticles by self-propagating low temperature combustion method. Recent Res. Sci. Technol. 4(4), 50–53 (2012)
Ginley, D.S.: Handbook of Transparent Conductors, p. 437. Springer, London (2010)
Greenwood, N.N., Ross, E.J.F.: Index of Vibrational Spectra of Inorganic and Organometallic Compounds, vol. I, pp. 326–328. Butterworth Group, London (1960)
Greenwood, N.N., Ross, E.J.F.: Index of Vibrational Spectra of Inorganic and Organometallic Compounds, vol. II, p. 457. Butterworth Group, London (1963)
Greenwood, N.N., Ross, E.J.F.: Index of Vibrational Spectra of Inorganic and Organometallic Compounds, vol. III, pp. 800–1078. Butterworth Group, London (1966)
Haider, Md.J: Deposition of hard and solid lubricant (TiN + MoSx) coating by closed-field magnetron sputtering. PhD thesis, School of Mechanical and Manufacturing Engineering, Dublin University, Ireland, pp. 56–58, 176 (2005)
Ismail, R.A., Ghafori, S., Kadhim, G.A.: Preparation and characterization of nanostructured NiO thin films by spray pyrolysis. Appl. Nanosci. 3, 509–514 (2013)
Korošec, R.C., Bukovec, P.: Sol–gel prepared NiO thin films for electrochromic applications. Acta Chim. Slov. 53, 136–147 (2006)
Patil, P.S., Kadam, L.D.: Preparation and characterization of spray pyrolyzed nickel oxide (NiO) thin films. Appl. Surf. Sci. 199, 211–221 (2002)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hammadi, O.A., Khalaf, M.K. & Kadhim, F.J. Farbication of UV photodetector from nickel oxide nanoparticles deposited on silicon substrate by closed-field unbalanced dual magnetron sputtering techniques. Opt Quant Electron 47, 3805–3813 (2015). https://doi.org/10.1007/s11082-015-0247-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11082-015-0247-6