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Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

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Abstract

In this paper, the effects of initial deflection on the static and dynamic behaviors of circular capacitive transducers are experimentally investigated. The obtained results are in good agreement with numerical simulations. It is shown that the initial deflection has a major impact on the static response of the resonator by shifting the pull-in voltage, and on its dynamic response by increasing the resonance frequency and modifying the bifurcation topology from softening to hardening behavior. Moreover, the dynamic behavior of the microplate may display nonlinear periodic and quasiperiodic responses due to geometric and electrostatic nonlinearities.

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Data Availability Statement

Raw data were generated using the experimental equipments of FEMTO-ST institute. Derived data supporting the findings of this study are available from the first author Aymen Jallouli on request.

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Acknowledgements

This project was supported by the Bourgogne-Franche-Comté region and the EUR EIPHI program (ANR 17-EURE-0002).

Funding

This project was funded by the Bourgogne-Franche-Comté region.

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Authors and Affiliations

  1. Department of Applied Mechanics, Univ. Bourgogne Franche-Comté, FEMTO-ST Institute, UMR 6174, CNRS/UFC/ENSMM/UTBM, F-25000, Besançon, France

    Aymen Jallouli, Najib Kacem, Gilles Bourbon, Patrice Le Moal & Joseph Lardies

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  1. Aymen Jallouli
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  2. Najib Kacem
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Correspondence to Najib Kacem.

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Jallouli, A., Kacem, N., Bourbon, G. et al. Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection. Nonlinear Dyn 103, 2329–2343 (2021). https://doi.org/10.1007/s11071-021-06242-4

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