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Out-of-plane vibration of an electrostatically actuated microbeam immersed in flowing fluid

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Abstract

The present work investigates the out-of-plane nonlinear vibration of an electrostatically actuated cylindrical microbeam immersed in flowing fluid. The lift and drag forces as the two basic flow-induced factors affecting the dynamics of the microbeam are modeled using Van der Pol equation. The Euler–Bernoulli beam theory is used to simulate the new nonlinear model of beam cross fluid and inline motion with considering geometrical nonlinearities effects. The coupled nonlinear equations governing the microbeam out-of-plane motion and the wake oscillation are solved using the Galerkin and the step-by-step linearization methods to evaluate the response of the coupled structure to a combined applied voltage and fluid flow. Response of the microbeam to different input voltages in the presence of fluid flow is investigated in two directions of normal and parallel to fluid flow. It is shown that applying voltage not only can be used to control the lock-in regime, but also can increase the maximum dynamic amplitude up to 100 percent for a given flowing fluid. Moreover, ignoring inline vibration and geometrical nonlinearities effects may decrease the accuracy of the obtained maximum amplitude up to 18 percent in the lock-in regime.

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  1. Department of Mechanical Engineering, University of Tabriz, Tabriz, Iran

    Mousa Rezaee & Naser Sharafkhani

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  1. Mousa Rezaee
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Rezaee, M., Sharafkhani, N. Out-of-plane vibration of an electrostatically actuated microbeam immersed in flowing fluid. Nonlinear Dyn 102, 1–17 (2020). https://doi.org/10.1007/s11071-020-05882-2

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