Journal of Nanoparticle Research

, Volume 10, Issue 6, pp 935–945 | Cite as

Aerosol processing for nanomanufacturing

Research Paper

Abstract

Advances in nanoparticle synthesis are opening new opportunities for a broad variety of technologies that exploit the special properties of matter at the nanoscale. To realize this potential will require the development of new technologies for processing nanoparticles, so as to utilize them in a manufacturing context. Two important classes of such processing technologies include the controlled deposition of nanoparticles onto surfaces, and the application of chemically specific coatings onto individual nanoparticles, so as to either passivate or functionalize their surfaces. This paper provides an overview of three technologies related to these objectives, with an emphasis on aerosol-based methods: first, the deposition of nanoparticles by hypersonic impaction, so as so spray-coat large areas with nanoparticles; second, the use of aerodynamic lenses to produce focused beams of nanoparticles, with beam widths of a few tens of microns, so as to integrate nanoparticle-based structures into microelectromechanical systems; and third, the coating of individual nanoparticles by means of photoinduced chemical vapor deposition (photo-CVD), driven by excimer lamps. We also discuss the combination of these technologies, so that nanoparticle synthesis, together with multiple processing steps, can be accomplished in a single flow stream.

Keywords

Hypersonic plasma particle deposition Focused particle beams Nanoparticle coating Nanomanufacturing Synthesis Processing 

References

  1. Barry CR, Lwin NZ, Zheng W, Jacobs HO (2003) Printing nanoparticle building blocks from the gas phase using nanoxerography. Appl Phys Lett 83:5527–5529CrossRefGoogle Scholar
  2. Beaber AR, Qi LJ, Hafiz J, Heberlein JVR, McMurry PH, Gerberich WW, Girshick SL (2007) Nanostructured SiC by chemical vapor deposition and nanoparticle impaction. Surf Coat Technol 202:871–875CrossRefGoogle Scholar
  3. Blum J, Tymiak N, Neuman A, Wong Z, Rao NP, Girshick SL, Gerberich WW, McMurry PH, Heberlein JVR (1999) The effect of substrate temperature on the properties of nanostructured silicon carbide films deposited by hypersonic plasma particle deposition. J Nanopart Res 1:31–42CrossRefGoogle Scholar
  4. Di Fonzo F, Gidwani A, Fan MH, Neumann D, Iordanoglou DI, Heberlein JVR, McMurry PH, Girshick SL, Tymiak N, Gerberich WW, Rao NP (2000) Focused nanoparticle-beam deposition of patterned microstructures. Appl Phys Lett 77:910–912CrossRefGoogle Scholar
  5. Fernandez de la Mora J, Hering SV, Rao N, McMurry PH (1990) Hypersonic impaction of ultrafine particles. J Aerosol Sci 21:169–187CrossRefGoogle Scholar
  6. Fernandez de la Mora J, Schmidt-Ott A (1993) Performance of a hypersonic impactor with silver particles in the 2 nm range. J Aerosol Sci 24:409–415CrossRefGoogle Scholar
  7. Girshick SL (1998) Diamond CVD using radio-frequency plasmas. In: Prelas MA, Popovici G, Bigelow K (eds) Industrial handbook for diamond and diamond films, Marcel Dekker, New York, pp 851–864Google Scholar
  8. Girshick SL, Hafiz J (2007) Thermal plasma synthesis of nanostructured silicon carbide films. J Phys D 40:2354–2360CrossRefGoogle Scholar
  9. Hafiz J, Mukherjee R, Wang X, Heberlein JVR, McMurry PH, Girshick SL (2006a) Analysis of nanostructured coatings synthesized through ballistic impaction of nanoparticles. Thin Solid Films 515:1147–1151CrossRefGoogle Scholar
  10. Hafiz J, Mukherjee R, Wang X, McMurry PH, Heberlein JVR, Girshick SL (2006b) Hypersonic plasma particle deposition—a hybrid between plasma spraying and vapor deposition of nanophase materials. J Therm Spray Technol 15:822–826CrossRefGoogle Scholar
  11. Kim H-S, Choi D-J (1999) Effect of diluent gases on growth behavior and characteristics of chemically vapor deposited silicon carbide films. J Am Ceram Soc 82:331–337CrossRefGoogle Scholar
  12. Kogelschatz U, Esrom H, Zhang J-Y, Boyd IW (2000) High-intensity sources of incoherent UV and VUV excimer radiation for low-temperature materials processing. Appl Surf Sci 6419:1–8Google Scholar
  13. Liao F, Park S, Larson JM, Zachariah MR, Girshick SL (2003) High-rate chemical vapor deposition of nanocrystalline silicon carbide films by radio frequency thermal plasma. Mater Lett 57:1982–1986CrossRefGoogle Scholar
  14. Liao F, Girshick SL, Mook WM, Gerberich WW, Zachariah MR (2005) Superhard nanocrystalline silicon carbide films. Appl Phys Lett 86:171913CrossRefGoogle Scholar
  15. Liu BYH, Pui DYH, Whitby KT, Kittelson DB, Kousaka Y, McKenzie RL (1978) The aerosol mobility chromatograph: a new detector for sulfuric acid aerosols. Atmos Environ 12:99–104CrossRefGoogle Scholar
  16. Liu P, Ziemann PJ, Kittelson DB, McMurry PH (1995a) Generating particle beams of controlled dimensions and divergence: I. Theory of particle motion in aerodynamic lenses and nozzle expansions. Aerosol Sci Technol 22:293–313CrossRefGoogle Scholar
  17. Liu P, Ziemann PJ, Kittelson DB, McMurry PH (1995b) Generating particle beams of controlled dimensions and divergence: II. Experimental evaluation of particle motion in aerodynamic lenses and nozzle expansions. Aerosol Sci Technol 22:314–324CrossRefGoogle Scholar
  18. Mangolini L, Jurbergs D, Rogojina E, Kortshagen U (2006) High efficiency photoluminescence from silicon nanocrystals prepared by plasma synthesis and organic surface passivation. Phys Stat Sol (c) 3:3975–3978CrossRefGoogle Scholar
  19. McColm IJ (1990) Ceramic hardness. Plenum, New YorkGoogle Scholar
  20. Pal R (2005) New models for effective Young’s modulus of particulate composites. Composites Pt B 36:513–523CrossRefGoogle Scholar
  21. Rao NP, Lee HJ, Kelkar M, Hansen DJ, Heberlein JVR, McMurry PH, Girshick SL (1997) Nanostructured materials production by hypersonic plasma particle deposition. Nanostruct Mater 9:129–132CrossRefGoogle Scholar
  22. Rao NP, Tymiak N, Blum J, Neuman A, Lee HJ, Girshick SL, McMurry PH, Heberlein J (1998) Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide. J Aerosol Sci 29:707–720CrossRefGoogle Scholar
  23. Rao NP, Girshick SL, McMurry PH, Heberlein JVR (1999) Production of nanostructured materials by hypersonic plasma particle deposition. US Patent 5,874,134, 23 Feb 1999Google Scholar
  24. Rao NP, Heberlein JVR, Gerberich WW, Girshick SL, McMurry PH (2005) Apparatus and method for synthesizing films and coatings by focused particle beam deposition. US patent 6,924,004, 2 Aug 2005Google Scholar
  25. Schlichting H (2000) Boundary-layer theory. Springer, New YorkGoogle Scholar
  26. Valentini P, Dumitrica T (2007) Microscopic theory for nanoparticle-surface collisions in crystalline silicon. Phys Rev B 75:224106CrossRefGoogle Scholar
  27. Wang X, Gidwani A, Girshick SL, McMurry PH (2005a) Aerodynamic focusing of nanoparticles: II. Numerical evaluation of an aerodynamic lens assembly focusing 3–30 nm particles. Aeosol Sci Technol 39:624–636CrossRefGoogle Scholar
  28. Wang X, Hafiz J, Mukherjee R, Renault T, Heberlein J, Girshick SL, McMurry PH (2005b) System for in-situ characterization of nanoparticles synthesized in a thermal plasma process. Plasma Chem Plasma Process 25:439–453CrossRefGoogle Scholar
  29. Wang X, Kruis FE, McMurry PH (2005c) Aerodynamic focusing of nanoparticles: I. Guidelines of designing aerodynamic lenses for nanoparticles. Aeosol Sci Technol 39:611–623CrossRefGoogle Scholar
  30. Zhang Z, Chen DL (2007) Prediction of fracture strength in Al2O3/SiCp ceramic matrix nanocomposites. Sci Technol Adv Mater 8:5–10CrossRefGoogle Scholar
  31. Zhang B, Liao Y-C, Roberts JT, Girshick SL (2008) Growth of coatings on aerosolized nanoparticles by photoinduced chemical vapor deposition. J Nanopart Res 10:173–178CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2007

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringUniversity of MinnesotaMinneapolisUSA

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