The structure, the stress-strain state, and the mechanical properties (hardness and wear resistance) of titanium nitride coatings deposited on a substrate by a vacuum-arc method at constant (from –5 V to –230 V) and high-frequency pulse (–1000 V) negative potentials are studied. The laws of formation of the coatings are determined. The formed coatings are analyzed using a model of two-level action of the implanted ions on them.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
G. V. Samsonov, Nitrides [in Russian], Naukova Dumka, Kiev (1969), 380 p.
A. S. Metel, S. N. Grigoriev, Yu. A. Melnik, and V. V. Panin, “Filling the vacuum chamber of a technological system with homogeneous plasma using a stationary glow discharge,” Plasma Phys. Rep., No. 12, 1058–1067 (2009).
S. H. N. Lim, D. G. McCulloch, M. M. M. Bilek, and D. R. McKenzie, Surf. Coat. Technol., 174–175, 76–80 (2003).
W. Olbrich and G. Kampschulte, “Superimposed pulse bias voltage used in arc and sputter technology,” Surf. Coat. Technol., 59, 274–280 (1993).
M. M. M. Bilek, D. R. McKenzie, R. N. Tarant, et al., “Plasma-based ion implantation utilising a cathodic arc plasma,” Surf. Coat. Technol., 156, 136–142 (2003).
I. I. Demidenko, N. S. Lomino, V. D. Ovcharenko, et al., “A study of the state of titanium plasma,” Khim. Vys. Energ., XX(6), 538–540 (1986).
A. A. Andreev, L. P. Sablev, and S. N. Grigoriev, Vacuum-Arc Coatings [in Russian], NNTs KhFTI, Kharkov (2010), 317 p.
L. S. Palatnik, M. Ya. Fuks, and V. M. Kosevich, Mechanism of Formation and Substructure of Condensed Films [in Russian], Nauka, Moscow (1972), 320 p.
I. S. Noyan and J. B. Cohen, Residual Stress Measurement by Diffraction and Interpretation, Springer-Verlag, New York (1987), 350 p.
C. Genzel and W. Reinmers, “A study of x-ray residual-stress gradient analysis in thin layers with strong filer texture,” Phys. Status Solidi A, 166(2), 751–762 (1998).
P. Gargaud, S. Labat, O. Thomas, et al., “Limits of validity of the crystalline group method in stress determination of thin film structures,” Thin Solid Films, 319,9–15 (1998).
E. Aznakayev, “Micron-gamma for estimation the physicomechanical properties of micro-materials,” Proc. Int. Conf. “Small Talk – 2003,” San Diego, California, USA (2003), TP.001, pp.8–10.
A. G. Gomez, A. A. Recco, and N. B. Lima, “Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition,” Surf. Coat. Technol., 204, 3228–3233 (2010).
A. Cavaleiro and J. T. de Hosson (eds.), Nanostructured Coatings [Russian translation], Tekhnosfera, Moscow (2011), 752 p.
S. N. Grigoriev and A. S. Metel, “Plasma-and beam-assisted deposition methods,” in: Nanostructured Thin Films and Nanodispersion Strengthened Coatings, NATO Sci. Ser. II: Math., Phys. Chem. (2004), 147–154.
I. I. Aksenov, Yu. N. Anufriev, V. G. Bren, et al., “Effect of gas pressure in reaction volume on the process of synthesis of nitrides in condensation of metal plasma,” Khim. Vys. Energ., 20(1), 82–86 (1986).
O. Piot, C. Gautier, and J. Machet, “Comparative study of CrN coatings deposited by ion plating and vacuum arc evaporation. Influence of the nature and the energy of the layer-forming species on the structural and the mechanical properties,” Surf. Coat. Technol., 94–95, 409 – 415 (1997).
O. V. Sobol, S. N. Dub, O. N. Grigoriev, et al., “Special features of the phase composition, structure, stress state, and mechanical characteristics of condensates of the W – Ti – B boride system obtained by triode sputtering,” Sverkhtverd. Mater., No. 5, 38–47 (2005).
D. R. McKenzie, Y. Tin, W. D. McFall, and N. H. Hoang, “The orientation dependence of elastic strain energy in cubic crystals and its application to the preferred orientation in titanium nitride thin films,” J. Phys. Condens. Matter, No. 8, 5883–5890 (1996).
N. A. Marks, “Evidence for subpicosecond thermal spikes in the formation of tetrahedral amorphous carbon,” Phys. Rev. B, Condens. Matter., 56(5), 2441–2446 (1997).
A. F. Burenkov, F. F. Komarov, M. A. Kumakov, and M. M. Temkin, Spatial Distribution of Energy Emitted in Cascade of Atomic Collisions in Solids [in Russian], Énergoatomizdat, Moscow (1985), 248 p.
A. D. Korotaev, D. P. Borisov, V. Yu. Moshkov, et al., “Elastically stressed state of superhard coatings,” Fiz. Mezomekh., 12(4), 79–91 (2009).
P. H. Mayrhofer, G. Tischler, and C. Mitterer, “Microstructure and mechanical/thermal properties of Cr – N coatings deposited by reactive unbalanced magnetron sputtering,” Surf. Coat. Technol., 142–144, 78–84 (2001).
P. H. Mayrhofer, F. Kunc, J. Musil, and C. Mitterer, “A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings,” Thin Solid Films, 415, 151–159 (2002).
F. Kunc, J. Musil, P. H. Mayrhofer, and C. Mitterer, “Low-stress superhard Ti – B films prepared by magnetron sputtering,” Surf. Coat. Technol., 174–175, 744–753 (2003).
B. Rother and H. Kappl, “Effect of low boron concentrations on the thermal stability of hard coatings,” Surf. Coat. Technol., 96, 163–168 (1997).
P. H. Mayrhofer, C. Mitterer, L. Hultman, and H. Clemens, “Microstructural design of hard coatings,” Progr. Mater. Sci., 51, 1032–1114 (2006).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Metallovedenie i Termicheskaya Obrabotka Metallov, No. 4, pp. 43–51, April, 2012.
Rights and permissions
About this article
Cite this article
Sobol’, O.V., Andreev, A.A., Grigoriev, S.N. et al. Effect of high-voltage pulses on the structure and properties of titanium nitride vacuum-arc coatings. Met Sci Heat Treat 54, 195–203 (2012). https://doi.org/10.1007/s11041-012-9481-8
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11041-012-9481-8