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Application of Flexible Waveguides for Vibroacoustic Monitoring of Technological Processes in Vacuum Chambers

  • ACOUSTIC MEASUREMENTS
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Measurement Techniques Aims and scope

The complexities of implementing production processes in vacuum chambers are analyzed: powerful electromagnetic interference, the small overall dimensions of the chamber, and the inaccessibility of the work space. The timely nature of the methods of operational monitoring of such processes is shown. The monitoring of vibroacoustic signals by means of monitoring systems that permit obtaining information on the progress of a production process, the instrumental state, the necessity of adjusting the conditions of processing, etc., is described. Conditions are described in which vibration monitoring in the work zone is made more complex by the conditions of the handling process, such as for electron-beam doping in the vacuum chamber. The possibility of obtaining vibroacoustic information from the work zone of a vacuum chamber by means of a flexible waveguide is studied, and the results of the studies are given. The frequency characteristics of flexible waveguides and the possibility of their use for monitoring production processes with a hard-to-access processing zone are evaluated. The effect on the transmission coefficient of a waveguide from its cross-sectional area and its seal at the input to the vacuum chamber, as well as additional voltage, is analyzed. The prospects for using flexible waveguides in hard-to-access spaces in the operations zone of a work space are shown.

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Authors and Affiliations

  1. Moscow State University of Technology STANKIN, Moscow, Russia

    M. P. Kozochkin & F. S. Sabirov

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  1. M. P. Kozochkin
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  2. F. S. Sabirov
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Correspondence to M. P. Kozochkin.

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Translated from Izmeritel’naya Tekhnika, No. 3, pp. 59–64, March, 2022.

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Kozochkin, M.P., Sabirov, F.S. Application of Flexible Waveguides for Vibroacoustic Monitoring of Technological Processes in Vacuum Chambers. Meas Tech 65, 213–218 (2022). https://doi.org/10.1007/s11018-022-02071-y

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  • DOI: https://doi.org/10.1007/s11018-022-02071-y

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