This study considers existing metrological self-monitoring methods of sensors used in technological industries for measuring temperature and pressure. Furthermore, metrological self-monitoring methods of piezoresistive pressure sensors are analyzed. Then, a new metrological self-monitoring method is proposed on the basis of the supply voltage on the measuring diagonal of the bridge. The temperature of the piezoresistive bridge is determined using a semiconductor thermistor installed near the bridge. In this manner, the change in bridge resistance can be adjusted depending on the change in bridge temperature. With aging and exposure to external conditions, a change in the overall resistance of the piezoresistive bridge can be used to judge the error of the sensor. An experimental model of a piezoresistive pressure sensor is then developed. In the sample, the failure of the piezoresistive bridge is simulated by connecting an additional resistor in parallel with one of the arms of the bridge. The experimental studies show that the proposed technical method can assess the effect of changes in the total bridge resistance on the error of the sensor.
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Translated from Metrologiya, No. 1, pp. 48–62, January–March, 2020.
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Larionov, V.A. Metrological Self-Monitoring Method of Piezoresistive Pressure Sensors. Meas Tech 63, 184–190 (2020). https://doi.org/10.1007/s11018-020-01770-8
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DOI: https://doi.org/10.1007/s11018-020-01770-8