The basic structural blocks and functional capabilities of smart sensors are considered. An implementation of the functions of metrological diagnostic self-checking of sensors equipped with a bridge measuring circuit is proposed. An adaptive strain-gauge pressure sensor based on nano- and micro-electromechanical systems is investigated.
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V. A. Vasil’ev is deceased.
Translated from Izmeritel’naya Tekhnika, No. 7, pp. 11–17, July, 2018.
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Belozubov, E.M., Vasil’ev, V.A. & Chernov, P.S. Metrological Self-Checking of Smart Sensors of Measurement and Control Systems. Meas Tech 61, 660–669 (2018). https://doi.org/10.1007/s11018-018-1481-7
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DOI: https://doi.org/10.1007/s11018-018-1481-7