A new dynamic method of measuring the local value of hardness and contact stiffness at the nanoscale range using a probe in self-oscillation mode at resonant eigenfrequency is proposed. The possibility is shown of measuring the force of contact interaction of a probe with a sample in a range from ten to several hundred μN with shift of the probe’s resonant eigenfrequency, at a resolution up to one hundred nN. The advantage of this method is the absence of a drift component of the measuring signal during the time interval of a test cycle. This ensures operability of the method without special conditions of vibration insulation and thermal insulation that are necessary for instrumental indentation.
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Translated from Izmeritel’naya Tekhnika, No. 8. pp. 15–19, August, 2017.
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Meshcheryakov, V.V., Maslennikov, V.V. & Melekesov, E.V. A Dynamic Method of Nanoindentation. Meas Tech 60, 771–776 (2017). https://doi.org/10.1007/s11018-017-1269-1
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DOI: https://doi.org/10.1007/s11018-017-1269-1