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Technique for Contactless Measurements of the Electromagnetic Parameters of Thin Films and Nanomaterials

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Measurement Techniques Aims and scope

A contactless operational method for measuring the electromagnetic parameters of thin films and nanomaterials is developed. It is based on probing the monitored surface with an electromagnetic signal. The measurement procedure is described mathematically. A method is presented for calculating the unknown parameters based on measuring the amplitude and phase of the reflected signal at different frequencies and solving a system of algebraic equations.

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This work was supported by the Ministry of Education and Science of Russia (unique identifier for applied science research RFMEF157414X0094).

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Authors and Affiliations

  1. Samara State Aerospace University (National Research University), Samara, Russia

    B. V. Skvortsov, S. A. Borminskii & A. V. Solntseva

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  1. B. V. Skvortsov
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  2. S. A. Borminskii
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  3. A. V. Solntseva
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Correspondence to A. V. Solntseva.

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Translated from Metrologiya, No. 2, pp. 27–40, April–June, 2016.

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Skvortsov, B.V., Borminskii, S.A. & Solntseva, A.V. Technique for Contactless Measurements of the Electromagnetic Parameters of Thin Films and Nanomaterials. Meas Tech 59, 663–670 (2016). https://doi.org/10.1007/s11018-016-1027-9

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  • DOI: https://doi.org/10.1007/s11018-016-1027-9

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