An absolute calibration algorithm has been implemented using the two-plane method. Optical surface profile recovery error is analyzed using mathematical modeling and experimental data.
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Translated from Izmeritel’naya Tekhnika, No. 2, pp. 28–32, February, 2016.
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Gladysheva, Y.V., Zhivotovskii, I.V., Denisov, D.G. et al. A Profile-Recovery Algorithm for a High-Accuracy Optical Flat. Meas Tech 59, 142–148 (2016). https://doi.org/10.1007/s11018-016-0932-2
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DOI: https://doi.org/10.1007/s11018-016-0932-2