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Laser Modulation Interference Microscopy as a Means of Controlling the Form and Roughness of Optical Surfaces

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Measurement Techniques Aims and scope

The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered.

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References

  1. T. B. Teplova, “Features of microscopic polishing of crystals of leucosappire on a numerically controlled machine tool module,” Gornyi Inform. Anal. Byull., No. 3, 52–56 (2005).

  2. V. A. Andreev and K. V. Indukaev, “The problem of subrayleigh resolution in interference microscopy,” J. Rus. Laser Res., 24, No. 3, 220–224 (2003).

    Article  Google Scholar 

  3. A. V. Loparev, P. S. Ignat’ev, K. V. Indukaev, et al., “High-speed modulation interference microscope for medical and biological studies,” Izmer. Tekhn., No. 11, 60–64 (2009).

  4. V. I. Teleshevskii, A. V. Shulepov, and A. P. Yesin, “Methods of increasing the precision of linear measurements on measuring microscopes by digital processing of optical images,” Vest. MGTU Stankin, No. 1, 102–107 (2009).

  5. V. I. Teleshevskii, A. V. Shulepov, and E. M. Rozdina, “Increasing the precision of measurements of linear and angular dimensions of articles in smart computer microscopy,” Vest. MGTU Stankin, No. 4, 35–38 (2011).

  6. V. I. Teleshevskii and V. A. Sokolov, “Analysis of volumetric geometric errors in multicoordinate measurement and production systems based on laser measurements,” Izmer. Tekhn., No. 12, 19–23 (2013).

  7. S. G. Grishin and V. I. Teleshevskii, “Analysis of phase noise in heterodyne interferometry with acousto-optical transformation of the frequency of light,” Izmer. Tekhn., No. 1, 17–21 (2014).

  8. I. V. Latonov and A. V. Shulepov, “Method of contactless estimation of surface roughness from a digital image of the surface created by the optical system of a measuring microscope,” Vest. MGTU Stankin, No. 1, 141–145 (2013).

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Authors and Affiliations

  1. AMPHORA Laboratories, Moscow, Russia

    P. S. Ignat’ev, L. S. Kol’ner & K. V. Indukaev

  2. STANKIN Moscow State Technological University, Moscow, Russia

    V. I. Teleshevskii

Authors
  1. P. S. Ignat’ev
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  2. L. S. Kol’ner
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  3. K. V. Indukaev
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  4. V. I. Teleshevskii
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Corresponding author

Correspondence to P. S. Ignat’ev.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 7, pp. 32–35, July, 2015.

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Ignat’ev, P.S., Kol’ner, L.S., Indukaev, K.V. et al. Laser Modulation Interference Microscopy as a Means of Controlling the Form and Roughness of Optical Surfaces. Meas Tech 58, 772–776 (2015). https://doi.org/10.1007/s11018-015-0792-1

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  • DOI: https://doi.org/10.1007/s11018-015-0792-1

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