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Measurement Techniques

, Volume 58, Issue 7, pp 772–776 | Cite as

Laser Modulation Interference Microscopy as a Means of Controlling the Form and Roughness of Optical Surfaces

  • P. S. Ignat’ev
  • L. S. Kol’ner
  • K. V. Indukaev
  • V. I. Teleshevskii
Article
  • 33 Downloads

The use of the technology of modulation interference microscopy as an effective means of quality control of precision optical surfaces with roughness on the order of 1 nm and flatness up to 10 nm at an aperture up to 100 mm is considered.

Keywords

modulation interference microscopy super-high resolution anisotropy optical surface 

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Copyright information

© Springer Science+Business Media New York 2015

Authors and Affiliations

  • P. S. Ignat’ev
    • 1
  • L. S. Kol’ner
    • 1
  • K. V. Indukaev
    • 1
  • V. I. Teleshevskii
    • 2
  1. 1.AMPHORA LaboratoriesMoscowRussia
  2. 2.STANKIN Moscow State Technological UniversityMoscowRussia

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