The metrological specification of micromechanical devices (angular velocity sensors and accelerometers) is determined. It is shown that the requirements imposed on their metrological characteristics substantially depend on the particular problems to be solved. The most stringent requirements are imposed where the sensors are functioning as components of inertial modules, when the process of reducing the errors in the measurement results includes integration operations. Approaches to normalization of the increasing errors following integration are formulated for these applications.
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Translated from Metrologiya, No. 9, pp. 3–14, September, 2014.
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Chelpanov, I.B., Evstifeev, M.I. & Kochetkov, A.V. Metrological Characteristics of Micromechanical Devices Used in Navigation Systems and Systems Used in the Control of Moving Objects. Meas Tech 57, 1121–1127 (2015). https://doi.org/10.1007/s11018-015-0589-2
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DOI: https://doi.org/10.1007/s11018-015-0589-2