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The Effect of Focusing on the Lateral Resolution of an Interference Microscope

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Measurement Techniques Aims and scope

The dependence of the lateral resolution of an interference microscope on the distance between the phase step and the focal plane of the objective of the microscope object channel is analyzed. The results of measurements at several wavelengths, obtained by numerical modeling over a wide range of heights of the phase step and by processing actual phase images, are compared.

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References

  1. G. G. Levin et al., “The lateral resolution of an interference microscope,” Izmer. Tekhn., No. 5, 16–19 (2013); Measur. Techn., 56, No. 5, 486–491 (2013).

  2. M. Totzeck and H. J. Tiziani, “Interference microscopy of sublambda structures: A rigorous computation method and measurements,” Opt. Commun., 136, 61–74 (1997).

    Article  ADS  Google Scholar 

  3. K. Yee, “Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Anten. Propagat., 14, 302–307 (1966).

    Article  MATH  ADS  Google Scholar 

  4. A. Taflove and M. E. Brodwin, “Numerical solution of steady-state electromagnetic scattering problems using the time-dependent Maxwell’s equations,” IEEE Trans. Microwave Theory Tech., 23, 623–630 (1975).

    Article  ADS  Google Scholar 

  5. V. P. Tychinskii, “Super-resolution and singularities in phase images,” Usp. Fiz. Nauk, 178, 1205–1214 (2008).

    Article  Google Scholar 

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This research was supported by the Ministry of Education and Science of the Russian Federation (State Contract No. 6.552.11.7056 from July 11, 2012) using equipment generally available from the All-Russia Research Institute of Optophysical Measurements.

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Authors and Affiliations

  1. All-Russia Research Institute of Optophysical Measurements (VNIIOFI), Moscow, Russia

    G. G. Levin, N. N. Moiseev, Ya. A. Ilyushin & V. L. Minaev

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  1. G. G. Levin
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  2. N. N. Moiseev
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  3. Ya. A. Ilyushin
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  4. V. L. Minaev
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Correspondence to G. G. Levin.

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Translated from Izmeritel’naya Tekhnika, No. 1, pp. 45–48, January, 2014.

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Levin, G.G., Moiseev, N.N., Ilyushin, Y.A. et al. The Effect of Focusing on the Lateral Resolution of an Interference Microscope. Meas Tech 57, 69–73 (2014). https://doi.org/10.1007/s11018-014-0408-1

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  • DOI: https://doi.org/10.1007/s11018-014-0408-1

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