A method of constructing samples of a monodispersed ensemble of spherical particles of silicon oxide with a diameter of 26.6 ± 3.5 nm, distributed uniformly on the surface of a single-crystal silicon substrate of area 1 cm2 with a mean particle surface density of about 0.5 particles/μm2 is developed. The use of the test structure obtained to determine the effective radius of the tip of the probe of a scanning atomic-force microscope is demonstrated.
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Translated from Metrologiya, No. 10, pp. 32–37, October, 2013.
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Efimov, A.A., Ivanov, V.V., Volkov, I.A. et al. The Determination of the Effective Radius of the Tip of the Probe of an Atomic Force Microscope Using Monodispersed Silicon Oxide Nanoparticles. Meas Tech 56, 1343–1346 (2014). https://doi.org/10.1007/s11018-014-0379-2
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DOI: https://doi.org/10.1007/s11018-014-0379-2