Skip to main content
SpringerLink
Log in

Analysis of Uncertainties caused by Procedural and Instrumental Interferometry Errors in the Texture and Shape Parameters of a Surface

  • Published:
Measurement Techniques Aims and scope

Results of an analysis of the procedural and instrumental errors that unavoidably arise in measurement of the texture and shape parameters of a surface by means of the methods of three-dimensional interferometry with reference wave front and lateral shift interferometry are presented. It is noted that the errors in measurement of the current interference orders are responsible for the greatest contribution to the total procedural error, while the errors associated with measurement of the current coordinates and the shift are negligible. It is shown that the total error of the method of approximate integration is related to the interpolation error and depends on the state of the shape of the surface.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2

Similar content being viewed by others

References

  1. G. N. Vishnyakov et al., “Methods for automating the processing of interferograms of phase objects,” Metrologiya, No. 4,15–25 (2008).

  2. V. N. Krutikov (ed.), Measurement Assurance of Nanotechnologies and the Products of Nano-Industry: A Textbook [in Russian], Logos, Moscow (2011).

    Google Scholar 

  3. GOST R 8.743–2011, GSI. Optics and Photonics. Interference Measurements of Optical Elements and Systems. Part 1. Terms, Definitions, and Basic Relationships.

  4. R. K. Leach, Fundamental Principles of Engineering Nanometrology, Elsevier Science & Technology, New York (2010).

  5. C. Dotson, Fundamentals of Dimensional Metrology, Delmar Learning, New York (2006).

    Google Scholar 

  6. GOST R 8.629–2007, GSI. Nanometric-Range Texture Measures with Trapezoidal Profile of Elements. Testing Methods.

  7. GOST R 8.596–2002, Metrological Assurance of Measurement Systems. Basic Assumptions.

  8. S. A. Kononogov, S. S. Golubev, and V. G. Lysenko, “A study of the measurement and calibration capabilities of nanometric-range measuring instruments,” Zakonodat. Prikl. Metrol., No. 3, 19–26 (2008).

Download references

Author information

Authors and Affiliations

  1. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    D. A. Novikov, S. A. Kononogov, S. Yu. Zolotarevskii & V. L. Lyaskovskii

  2. All-Russia Research Institute of Optophysical Measurements (VNIIOFI), Moscow, Russia

    G. N. Vishnyakov, A. S. Gusev & G. G. Levin

Authors
  1. D. A. Novikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. A. Kononogov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Yu. Zolotarevskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. G. N. Vishnyakov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. S. Gusev
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. G. G. Levin
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. V. L. Lyaskovskii
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. Yu. Zolotarevskii.

Additional information

Translated from Metrologiya, No. 8, pp. 31–37, August, 2013.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Novikov, D.A., Kononogov, S.A., Zolotarevskii, S.Y. et al. Analysis of Uncertainties caused by Procedural and Instrumental Interferometry Errors in the Texture and Shape Parameters of a Surface. Meas Tech 56, 1006–1010 (2013). https://doi.org/10.1007/s11018-013-0320-0

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-013-0320-0

Keywords

Search

Navigation