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Specific Nature of Formation of Uncertainty in Measurements of the Geometric Parameters of Surface Texture by Means of Methods of High-Resolution Interferometry

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Measurement Techniques Aims and scope

The mechanism of formation of the uncertainty budget of measurements of the parameters of the texture and form of a surface in the nanometric range with reference to the typical optical circuits of the Twyman–Green and Fizeau interferometers is considered. It is noted that in most of the well-known studies a differential (difference) method of measurement is implemented. Amplitude and amplitude-phase interference methods of coordinate measurement of the deviation of the form of a surface are considered.

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The present study was completed with the support of the Ministry of Education and Science of the Russian Federation (State Contract No. 16.552.11.7056) with the use of equipment from the Time-Sharing Center of the All-Russia Research Institute of Optophysical Measurements.

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Authors and Affiliations

  1. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    S. Yu. Zolotarevskii, S. A. Kononogov & V. G. Lysenko

  2. All-Russia Research Institute of Optophysical Measurements (VNIIOFI), Moscow, Russia

    G. G. Levin, V. L. Lyaskovskii & A. S. Gusev

  3. Federal Agency on Technical Regulation and Metrology (ROSSTANDART), Moscow, Russia

    S. S. Golubev

Authors
  1. S. Yu. Zolotarevskii
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  2. S. A. Kononogov
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  3. V. G. Lysenko
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  4. G. G. Levin
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  5. V. L. Lyaskovskii
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  6. A. S. Gusev
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  7. S. S. Golubev
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Corresponding author

Correspondence to S. Yu. Zolotarevskii.

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Translated from Metrologiya, No. 8, pp. 11–21, August, 2013.

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Zolotarevskii, S.Y., Kononogov, S.A., Lysenko, V.G. et al. Specific Nature of Formation of Uncertainty in Measurements of the Geometric Parameters of Surface Texture by Means of Methods of High-Resolution Interferometry. Meas Tech 56, 999–1005 (2013). https://doi.org/10.1007/s11018-013-0319-6

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  • DOI: https://doi.org/10.1007/s11018-013-0319-6

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