The development of the reference samples SPAM-20 and SPAM-100 for the spatial characteristics of nanostructures, based on periodic multilayer Al2O3/TiO2 coatings and intended for monitoring measurement accuracy and certification of x-ray reflectometry measurement techniques, is discussed. The metrological characteristics of these standard samples are examined.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 20–25, June, 2013.
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Baturin, A.S., Bormashov, V.S., Ermakova, M.A. et al. Reference samples for the spatial characteristics of nanostructures based on amorphous multilayer coatings. Meas Tech 56, 605–611 (2013). https://doi.org/10.1007/s11018-013-0252-8
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DOI: https://doi.org/10.1007/s11018-013-0252-8