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Reference samples for the spatial characteristics of nanostructures based on amorphous multilayer coatings

  • Nanometrology
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Measurement Techniques Aims and scope

The development of the reference samples SPAM-20 and SPAM-100 for the spatial characteristics of nanostructures, based on periodic multilayer Al2O3/TiO2 coatings and intended for monitoring measurement accuracy and certification of x-ray reflectometry measurement techniques, is discussed. The metrological characteristics of these standard samples are examined.

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Authors and Affiliations

  1. Moscow Institute of Physics and Technology (MFTI), Dolgoprudnyi, Russia

    A. S. Baturin, V. S. Bormashov, M. A. Ermakova, E. A. Morozova, S. A. Morozov, E. V. Korostylev, S. S. Zarubin & A. M. Markeev

  2. Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV), Moscow, Russia

    P. A. Todua

Authors
  1. A. S. Baturin
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  2. V. S. Bormashov
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  3. M. A. Ermakova
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  4. E. A. Morozova
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  5. S. A. Morozov
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  6. E. V. Korostylev
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  7. S. S. Zarubin
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  8. A. M. Markeev
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  9. P. A. Todua
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Corresponding author

Correspondence to A. S. Baturin.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 6, pp. 20–25, June, 2013.

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Baturin, A.S., Bormashov, V.S., Ermakova, M.A. et al. Reference samples for the spatial characteristics of nanostructures based on amorphous multilayer coatings. Meas Tech 56, 605–611 (2013). https://doi.org/10.1007/s11018-013-0252-8

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  • DOI: https://doi.org/10.1007/s11018-013-0252-8

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