Thin-film nano- and micro-electromechanical systems of pressure transducers, experimental and theoretical research methods, and the results of estimation of the parameters of the morphology of the surfaces of films are considered. A model and algorithm for the description of the growth of thin films that takes diffusion into account are developed.
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Translated from Izmeritel’naya Tekhnika, No. 12, pp. 13–16, December, 2012.
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Vasiliev, V.A., Chernov, P.S. Modeling and estimation of the parameters of the morphology of the surfaces of thin films of nano- and micro-electromechanical systems. Meas Tech 55, 1350–1355 (2013). https://doi.org/10.1007/s11018-013-0133-1
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DOI: https://doi.org/10.1007/s11018-013-0133-1