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Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe

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Measurement Techniques Aims and scope

Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the probe. It is shown that this error may be reduced by selecting optimal parameters of the probe at which the actual measurement conditions correspond in the best way possible to the requirements of the computational model.

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The present study was performed with the support of the Ministry of Education and Science of the Russian Federation with the use of equipment from the Time-Sharing Center of the Moscow Institute of Physics and Technology (MFTI) and the Research Center for the Study of the Properties of Surfaces and Vacuum (NITs PV) (State Contract No.16.552.11.7038).

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Correspondence to V. V. Alzoba.

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Translated from Izmeritel’naya Tekhnika, No. 8, pp. 40–43, August, 2012.

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Alzoba, V.V., Kuzin, A.Y., Larionov, Y.V. et al. Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe. Meas Tech 55, 908–913 (2012). https://doi.org/10.1007/s11018-012-0059-z

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  • DOI: https://doi.org/10.1007/s11018-012-0059-z

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