Measurement Techniques

, Volume 55, Issue 8, pp 894–899 | Cite as

Methods of calibrating standard plasma radiators using an electron synchrotron with an intense magnetic field

  • S. I. Anevsky
  • Yu. M. Zolotarevsky
  • V. S. Ivanov
  • V. N. Krutikov
  • O. A. Minaeva
  • R. V. Minaev
  • D. N. Lashkov
  • D. S. Senin
Optophysical Measurements
  • 45 Downloads

Methods of calibrating secondary standard plasma radiators, based on the use of a synchrotron with an intense magnetic field, are developed, which enable problems of both vacuum coupling of the acceleration chamber and the plasma radiator to be solved, and also enable the degree of polarization of the synchronous radiation to be taken into account. It is shown that a comparison of the characteristics of the synchrotron radiation of the storage ring and of the electron synchrotron in the visible region using a telescope and cooled CCD matrix ensures that the relative synchrotron spectrum is absolute.

Keywords

plasma radiators electron synchrotron with an intense magnetic field electron storage ring CCD matrix radiometers-dosimeters spectroradiometers 

References

  1. 1.
    M. Richter et al., “Metrology of pulsed radiation for 157-nm lithography,” Appl. Opt., 41, 7167–7172 (2002).ADSCrossRefGoogle Scholar
  2. 2.
    V. Banine et al., “The relationship between EUV source and the performance of an EUV lithographic system,” Proc. SPIE, 3997, 126–135 (2000).ADSCrossRefGoogle Scholar
  3. 3.
    Yu. M. Zolotarevsky et al. “The use of synchrotron radiation to investigate multilayer nanostructures,” Izmer. Tekhn., No. 7, 32–35 (2010); Measur. Techn., 53, No. 7, 772–777 (2010).Google Scholar
  4. 4.
    B. Beckhoff et al., “High-accuracy EUV metrology of PTB using synchrotron radiation,” Proc. SPIE, No. 4344, 402–413 (2001).Google Scholar
  5. 5.
    F. Scholze, J. Tummler, and G. Ulm. “High-accuracy radiometry in the EUV range at the PTB soft x-ray radiometry beamline,” Metrologia, No. 40, S224–S228 (2003).Google Scholar
  6. 6.
    G. Brandt et al., “High-accuracy detector calibration for EUV metrology at PTB,” Proc. SPIE, No. 4688, 680–689 (2002).Google Scholar
  7. 7.
    S. I. Anevsky et al., Spectroradiometry of Optical Radiation. Encyclopaedia of Low-Temperature Plasma [in Russian], Nauka (2000), Vol. 2, pp. 532–533.Google Scholar
  8. 8.
    S. I. Anevsky, “Investigation of the characteristics of the synchrotron radiation of primary and secondary standard sources in the large electron bunch mode,” Metrologiya, No. 1, 20–30 (2002).Google Scholar
  9. 9.
    S. I. Anevsky, “Standard sources of synchrotron radiation,” Metrologiya, No. 12, 15–30 (2001).Google Scholar
  10. 10.
    S. I. Anevsky et al., “The development and investigation of an energy brightness measuring system in the vacuum and near-ultraviolet region based on CCD-matrices,” Izmer. Tekhn., No. 7, 26–31 (2010); Measur. Techn., 53, No. 7, 764–771 (2010).Google Scholar

Copyright information

© Springer Science+Business Media New York 2012

Authors and Affiliations

  • S. I. Anevsky
    • 1
  • Yu. M. Zolotarevsky
    • 1
  • V. S. Ivanov
    • 1
  • V. N. Krutikov
    • 1
  • O. A. Minaeva
    • 1
  • R. V. Minaev
    • 1
  • D. N. Lashkov
    • 1
  • D. S. Senin
    • 1
  1. 1.All-Russia Research Institute of Optophysical Measurements (VNIIOFI)MoscowRussia

Personalised recommendations