An approach is described for estimating the phase error owing to frequency fluctuations of the laser radiation in laser heterodyne interference measurement systems.
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Translated from Izmeritel’naya Tekhnika, No. 8, pp. 11–13, August, 2011.
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Grishin, S.G. Estimating phase errors in heterodyne laser interferometer measurement systems. Meas Tech 54, 865–868 (2011). https://doi.org/10.1007/s11018-011-9818-5
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DOI: https://doi.org/10.1007/s11018-011-9818-5