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Noise spectroscopy as a method of monitoring the quality of developed semiconductor devices

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Measurement Techniques Aims and scope

Typical noise power density spectra of photoreceivers, manufactured using different industrial technologies are presented. Technologies which reduce the 1/F α noise are considered.

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Authors and Affiliations

  1. Moscow Power Engineering Institute (Technical University), Moscow, Russia

    I. N. Miroshnikova

  2. Moscow Sapfir Factory, Moscow, Russia

    V. P. Astakhov

  3. Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Moscow, Russia

    E. V. Zenova, A. M. Tagachenkov & D. A. Rachnikov

Authors
  1. I. N. Miroshnikova
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  2. V. P. Astakhov
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  3. E. V. Zenova
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  4. A. M. Tagachenkov
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  5. D. A. Rachnikov
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Corresponding author

Correspondence to I. N. Miroshnikova.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 6, pp. 56–59, June, 2011.

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Miroshnikova, I.N., Astakhov, V.P., Zenova, E.V. et al. Noise spectroscopy as a method of monitoring the quality of developed semiconductor devices. Meas Tech 54, 712–715 (2011). https://doi.org/10.1007/s11018-011-9792-y

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  • DOI: https://doi.org/10.1007/s11018-011-9792-y

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