Skip to main content
SpringerLink
Log in

A standard low absolute pressure membrane-capacitance manometer

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

A membrane-capacitance manometer is described and theoretical calculations are carried out which enable the characteristics of the membrane to be determined more accurately while simultaneously taking three factors into account, namely, the stiffness, and the initial tension and extension of the middle plane from the bowing of the membrane. The effect of the error due to transverse oscillations of the membrane under the action of vibrations are estimated, and equations are derived for calculating the corresponding corrections.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1

Similar content being viewed by others

References

  1. A. V. Eryukhin, “The special state standard for the unit of pressure in the absolute pressure range 1·10–3 to 1·103 Pa,” Izmer. Tekhn., No. 4, 43–45 (1975); Measur. Techn., 18, No. 4, 541–544 (1975).

  2. S. N. Afanasiev, “An estimate of the error of the secondary standard of the unit of pressure for the absolute pressure range of 10–3–103 Pa,” Izmer. Tekhn., No. 9, 32–34 (1984); Measur. Techn., 27, No. 9, 802–804 (1984).

  3. V. I. Bakhtin, “An automatic compensation method for measuring low gas pressures,” Prib. Tekhn. Eksper., No. 1, 88–93 (1960).

  4. H. V. Drawin, Zeitschrift für Instrument, 68, 1–8 (1960).

    Google Scholar 

  5. V. A. Ryzhov, “The problem of metrological backup in vacuum measurements,” in: Metrological Service in USSR: Sci.-Tech. Abstr., Moscow (1989), Iss. 3, pp. 16–20.

  6. V. A. Ryzhov, “The upper limit of measurement of a membrane-capacitance manometer,” Izmer. Tekhn., No. 11, 14–16 (1963); Measur. Techn., 6, No. 11, 909–911 (1963).

  7. V. N. Gorobei and E. K. Izrailov, “Improvement of the method of reproducing the unit of low absolute pressures using a membrane-capacitance vacuum meter,” in: Vacuum Science and Techniques: Proc. 15th Conf., Sochi (2008), pp. 19–24.

  8. L. E. Andreeva, The Elastic Components of Instruments [in Russian], Mashinostroenie, Moscow (1981).

    Google Scholar 

  9. K. S. Izrailov, “An instrument for the capacitive recording of the height of the mercury column in a gas thermometer,” Trudy Inst. Kom. Stand., Mer Izmer. Priborov (1961), Iss. 51(111), pp. 12–22.

  10. V. A. Ryzhov, “A model membrane-capacitance manometer,” Prib. Tekhn. Eksper., No. 5, 198–202 (1963).

  11. V. N. Gorobei, E. K. Izrailov, and A. A. Polyakova, “A standard membrane-capacitance manometer of low absolute pressures with automatic electrostatic compensation,” Vacuum Science and Techniques: Proc. 16th Conf., Sochi (2009), pp. 34–39.

Download references

Author information

Authors and Affiliations

  1. Mendeleev All-Russia Research Institute of Metrology (VNIIM), St. Petersburg, Russia

    V. N. Gorobei & E. K. Izrailov

Authors
  1. V. N. Gorobei
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. K. Izrailov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. N. Gorobei.

Additional information

From a paper presented at the Mekhanometrika 2010 symposium.

Translated from Izmeritel’naya Tekhnika, No. 4, pp. 70–73, April, 2011.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gorobei, V.N., Izrailov, E.K. A standard low absolute pressure membrane-capacitance manometer. Meas Tech 54, 469–474 (2011). https://doi.org/10.1007/s11018-011-9749-1

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-011-9749-1

Key words

Search

Navigation