This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures. Modelling confirms a reduction in the effect of parasitic MIS structures in measurement circuits based on pulsed charge balancing.
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Translated from Izmeritel’naya Tekhnika, No. 3, pp. 16–19, March, 2011.
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Papko, A.A., Kalinin, M.A. & Alekseeva, V.V. Optimization of micromechanical accelerometer structures. Meas Tech 54, 240–245 (2011). https://doi.org/10.1007/s11018-011-9714-z
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DOI: https://doi.org/10.1007/s11018-011-9714-z