A unit is described for automatic calibration of gas flow controllers, within which there is a reference flowmeter device ERU-0.5, making it possible to measure gas working medium flow rates of 0.01–0.5 cm3/sec with a total error of ± (0.3–0.7)%. The operating principle of the construction, a procedure for determining gas mass flow rate, the main parameters of the flow rate device, and measurement errors are considered.
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S. G. Baidakov, B. Yu. Grishin, and V. L. Salin, RF Patent 2364842, “Method for checking gas flow rate and a device for its implementation,” Izobr. Polez. Modeli, No. 23 (2009).
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Translated from Izmeritel’naya Tekhnika, No. 2, pp. 44–47, February, 2011.
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Baidakov, S.G., Grishin, B.Y., Komarov, V.V. et al. Unit for automatic calibration of gas flow rate controllers. Meas Tech 54, 175–179 (2011). https://doi.org/10.1007/s11018-011-9702-3
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DOI: https://doi.org/10.1007/s11018-011-9702-3