We describe methods for using synchrotron radiation to study the metrological characteristics of multilayer nanostructures to be used as optical filters in the extreme vacuum ultraviolet range for solving nanoelectronics problems. For the synchrotron radiation metrology beamline, we have developed working standards for spectral irradiance and integrated irradiance.
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References
G. Ulm, “Radiometry with synchrotron radiation,” Metrologia, 40, 101–106 (2003).
U. Arp et al., “SURF III – an improved storage ring for radiometry,” Metrologia, 37, 357–360 (2000).
F. Scholze et al., “High-accuracy detector calibration in the 3–1500 eV spectral range at the PTB radiometry laboratory,” J. Synchrotron Rad., 5, 866 (1998).
S. I. Anevsky et al., “Use of synchrotron radiation for diagnostics of nanostructures by UV spectral radiometry methods,” Rusnanotech’09: Proc. of the 2nd Int. Forum on Nanotechnologies [in Russian], Moscow (2009), pp. 38–39.
S. I. Anevsky et al., “Calibration of a multichannel filtered radiometer of the KORONAS-FOTON satellite in the extreme ultraviolet region,” in: Photometry and Its Metrological Support: Proc. of the 17th All-Russia Sci. and Techn. Conf. [in Russian], Moscow (2009), pp. 112–114.
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Translated from Izmeritel’naya Tekhnika, No. 7, pp. 32–35, July, 2010.
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Zolotarevskii, Y.M., Anevsky, S.I., Ivanov, V.S. et al. Use of synchrotron radiation for studying multilayer nanostructures. Meas Tech 53, 772–777 (2010). https://doi.org/10.1007/s11018-010-9575-x
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DOI: https://doi.org/10.1007/s11018-010-9575-x