We describe methods and instrumentation that we have developed for measuring the radiance distribution over the emitting region of plasma emitters in the extreme vacuum ultraviolet region. The radiance comparator for vacuum and near ultraviolet radiation includes a reflecting telescope based on highly reflective nanostructures, a set of filters to eliminate the effect of scattered light and higher orders of diffraction, and a cooled CCD array.
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Translated from Izmeritel’naya Tekhnika, No. 7, pp. 26–31, July, 2010.
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Anevsky, S.I., Volkov, B.S., Drobkov, I.V. et al. Development and study of a radiance measurement system based on a CCD array in the vacuum and near ultraviolet region. Meas Tech 53, 764–771 (2010). https://doi.org/10.1007/s11018-010-9574-y
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DOI: https://doi.org/10.1007/s11018-010-9574-y