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A microresonator matrix for monitoring thermal fields

  • Thermal Measurements
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Measurement Techniques Aims and scope

An uncooled spectrally selective highly sensitive matrix integrated infrared-radiation converter is proposed in which the thermal-radiation pixel receiver is a resonance ring-shaped micron-size sandwich structure on a silicon base. The main characteristics that determine the practical importance of the converter are the temperature sensitivity of 1.3–10 mK and the speed of response of 3–25 msec.

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Correspondence to A. K. Esman.

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Translated from Izmeritel’naya Tekhnika, No. 5, pp. 48–51, May, 2010.

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Esman, A.K., Kuleshov, V.K. & Zykov, G.L. A microresonator matrix for monitoring thermal fields. Meas Tech 53, 533–537 (2010). https://doi.org/10.1007/s11018-010-9538-2

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  • DOI: https://doi.org/10.1007/s11018-010-9538-2

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