Methods for minimizing the effect of temperature on thin-film nano- and microelectromechanical systems and pressure sensors based on them are summarized. Properties are provided and different methods are described. Conclusions are derived from analyzing the methods about requirements for their comprehensive use.
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Translated from Izmeritel’naya Tekhnika, No. 8, pp. 51–54, August, 2009.
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Belozubov, E.M., Vasil’ev, V.A. & Gromkov, N.V. Minimization of the effect of temperature on thin-film nano- and microelectromechanical systems and pressure sensors based on them. Meas Tech 52, 853–858 (2009). https://doi.org/10.1007/s11018-009-9364-6
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DOI: https://doi.org/10.1007/s11018-009-9364-6