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Thin-film nano- and micro-electromechanical systems – the basis of contemporary and future pressure sensors for rocket and aviation engineering

  • Mechanical Measurements
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Measurement Techniques Aims and scope

Ways of improving information converters are considered, in particular, primary information converters (sensors). Problems are described that arise during the use of sensors in space rocket and aviation engineering. Designs are presented for thin-film nano- and micro-electromechanical systems that are the basis of contemporary and future tensoresistive pressure sensors. Areas of research are determined with the aim of minimizing the effect of critical destabilizing factors (temperature, vibration) within these systems and pressure sensors based upon them.

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Authors and Affiliations

  1. Penza State University, Penza, Russia

    E. M. Belozubov, V. A. Vasil’ev & N. V. Gromkov

Authors
  1. E. M. Belozubov
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  2. V. A. Vasil’ev
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  3. N. V. Gromkov
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Corresponding author

Correspondence to E. M. Belozubov.

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Translated from Izmeritel’naya Tekhnika, No. 7, pp. 35–38, July, 2009.

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Belozubov, E.M., Vasil’ev, V.A. & Gromkov, N.V. Thin-film nano- and micro-electromechanical systems – the basis of contemporary and future pressure sensors for rocket and aviation engineering. Meas Tech 52, 739–744 (2009). https://doi.org/10.1007/s11018-009-9336-x

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  • DOI: https://doi.org/10.1007/s11018-009-9336-x

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