It is shown that a multichannel silicon microresonator measuring instrument enables one to determine the temperature of micro-objects in a time of 24–79 msec with an error of 0.1 K in several channels simultaneously. A structural scheme is given and also the results of numerical modeling of the dynamics of thermal processes based on the one-dimensional heat-conduction equation of the measuring instrument, constructed on silicon substrates of different thickness and for different temperatures of the micro-objects.
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Translated from Izmeritel’naya Tekhnika, No. 3, pp. 55–57, March, 2009.
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Esman, A.K., Kuleshov, V.K. & Zykov, G.L. Analysis of the speed of response of a digital multichannel microresonator thermometer. Meas Tech 52, 307–311 (2009). https://doi.org/10.1007/s11018-009-9271-x
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DOI: https://doi.org/10.1007/s11018-009-9271-x