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Metrology and standards in nanotechnology

  • Nanometrology
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Measurement Techniques Aims and scope

The problems of metrological support in nanotechnology and the trends in the development of nanometrology are discussed. The present state of standardization in the nanotechnology industry is analyzed.

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Author information

Authors and Affiliations

  1. Moscow Engineering-Physics Institute (State University), Moscow, Russia

    V. I. Troyan, M. A. Pushkin, V. N. Tronin & V. D. Borman

  2. All-Russia Research Institute of Physico-Technical and Radio Engineering Measurements, Moscow, Russia

    P. A. Krasovskii

Authors
  1. V. I. Troyan
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  2. M. A. Pushkin
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  3. V. N. Tronin
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  4. V. D. Borman
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  5. P. A. Krasovskii
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Corresponding author

Correspondence to V. I. Troyan.

Additional information

Translated from Izmerital'naya Tekhnika, No. 9, pp. 45–48, September, 2008.

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Troyan, V.I., Pushkin, M.A., Tronin, V.N. et al. Metrology and standards in nanotechnology. Meas Tech 51, 992–997 (2008). https://doi.org/10.1007/s11018-008-9151-9

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  • DOI: https://doi.org/10.1007/s11018-008-9151-9

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