Abstract
A method is proposed for calibrating a scanning electron microscope that corresponds completely to national standards providing unification of measurements in nanotechnology.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 18–20, June, 2008.
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Volk, C.P., Novikov, Y.A., Rakov, A.V. et al. Calibrating a scanning electron microscope in two coordinates by the use of one certified dimension. Meas Tech 51, 605–608 (2008). https://doi.org/10.1007/s11018-008-9086-1
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DOI: https://doi.org/10.1007/s11018-008-9086-1