Abstract
A method is presented for measuring the scan linearity in an atomic-force microscope, which uses the first derivative of the signal. The method has been tested on a standard microscope and has shown good results.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 12–14, June, 2008.
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Rakov, A.V., Novikov, Y.A. & Todua, P.A. Linearity measurement in an atomic-force microscope. Meas Tech 51, 594–598 (2008). https://doi.org/10.1007/s11018-008-9084-3
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DOI: https://doi.org/10.1007/s11018-008-9084-3