Abstract
Descriptions are given of a primary-standard interference equipment and a computer program for measuring roughness parameters ranging from nanometers to millimeters.
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Translated from Izmeritel’naya Tekhnika, No. 11, pp. 13–16, November, 2007.
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Kupko, V.S., Lukin, I.V., Risto, V.A. et al. A primary standard equipment for measuring roughness parameters in the range from nanometers to millimeters. Meas Tech 50, 1143–1148 (2007). https://doi.org/10.1007/s11018-007-0213-1
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DOI: https://doi.org/10.1007/s11018-007-0213-1