Abstract
An interference comparator is described for measuring line scales and gratings in which total conformity is provided for the sections being compared, the effect of water vapor in the refractometer chamber is overcome, and a laser confocal microscope and digital processing of signals are used. In comparisons, the length-dependent divergence is 1·10−8L, and independent of length the standard divergence is 2 nm.
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Translated from Izmeritel’naya Tekhnika, No. 5, pp. 31–35, May, 2007.
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Bolonin, A.A. New VNIIM comparator for measurements of line scales for length. Meas Tech 50, 503–508 (2007). https://doi.org/10.1007/s11018-007-0100-9
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DOI: https://doi.org/10.1007/s11018-007-0100-9