Abstract
Optical Fourier transformation together with Fourier-transforming objectives are used to monitor the quality of the profile of parts. An analytic expression of the errors is obtained and their differential characteristics are investigated. The differential characteristics depend on the coordinates in the image plane (plane in which the spatial spectrum is formed).
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G. Stark (ed.), Application of Methods of Fourier Optics [Russian translation, I. N. Kompantz (ed.)], Radio i Svyaz’, Moscow (1988).
I. I. Pakhomov, V. N. Rozhdestvin, and O. V. Ryzhkov, Optoelectronic Devices [in Russian], Radio i Svyaz’, Moscow (1982).
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Translated from Izmeritel’naya Tekhnika, No. 12, pp. 24–26, December, 2006.
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Beklemishev, N.N., Borychev, A.L. An investigation of the errors of optical transducers of the image of a surface profile. Meas Tech 49, 1206–1209 (2006). https://doi.org/10.1007/s11018-006-0262-x
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DOI: https://doi.org/10.1007/s11018-006-0262-x