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Measurement Techniques

, Volume 49, Issue 8, pp 797–802 | Cite as

Computerization of measuring microscopes with digital analysis of images

  • V. I. Teleshevskii
  • A. V. Shulepov
  • O. Yu. Krasyuk
Article

Abstract

Problems of computerization for universal and measuring microscopes are considered. Methods are suggested for increasing the accuracy of guidance at the edge of an object based on digital analysis of the measurement zone image. The features and possibilities of a computerized measuring microscope are presented.

Key words

microscope computerization diffraction 

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Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  • V. I. Teleshevskii
    • 1
  • A. V. Shulepov
    • 1
  • O. Yu. Krasyuk
    • 1
  1. 1.Stankin Moscow State Technological UniversityRussia

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