Abstract
The structure and metrological properties have been determined for processing with digital logic applicable to a wide range of heterodyne laser interference systems employing digital phase monitoring in the submicrometer and nanometer resolving power ranges.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 13–18, June, 2006.
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Teleshevskii, V.I., Grishin, S.G. A heterodyne laser interferometer with digital phase conversion. Meas Tech 49, 545–551 (2006). https://doi.org/10.1007/s11018-006-0147-z
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DOI: https://doi.org/10.1007/s11018-006-0147-z