Abstract
“Interference” of MDS sensor senstivities, that consists of the fact that sensor response to gas concentration in air depends on the type and concentration of the accompanying (background) gas, is detected. A mechanism is suggested according to which “interference” effects are governed by the degree of filling the traps at the metal-dielectric interface of the MDS structure.
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References
E. V. Emelin, I. N. Nikolaev, and A. V. Sokolov, Datch. Sist., No. 10, 37 (2005).
A. V. Litvinov and I. N. Nikolaev, Metrologiya: Supplement to the Journal Izmer. Tekh., No. 8, 41 (2005).
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Translated from Izmeritel’naya Tekhnika, No. 2, pp. 62–64, February, 2006.
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Litvinov, A.V., Nikolaev, I.N. Interference of MDS sensor senstivities to concentration of a gas in air. Meas Tech 49, 192–195 (2006). https://doi.org/10.1007/s11018-006-0089-5
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DOI: https://doi.org/10.1007/s11018-006-0089-5