Abstract
We propose an optical system of a laser microinterferometer for step height measurement with nanometer resolution and we estimate the components of the error. We give a detailed description of a computer program and present an algorithm for processing interference patterns recorded by a CCD-camera.
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Translated from Izmeritel’naya Tekhnika, No.4, pp. 29–33, April, 2005.
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Korolev, A.N., Korotkov, V.I., Lukin, A.Y. et al. Measurement of the Step Height in the Nanometric Range Using a Laser Microinterferometer. Meas Tech 48, 352–358 (2005). https://doi.org/10.1007/s11018-005-0148-3
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DOI: https://doi.org/10.1007/s11018-005-0148-3