Abstract
Adhesion phenomena in poly-silicon Micro-Electro-Mechanical Systems (MEMS) are here studied by means of experimental characterization and numerical simulation. In the experimental part, the adhesion energy is measured on-chip by means of on-purpose designed and fabricated devices; moreover, the surface roughness is characterized through the Atomic Force Microscope. For the numerical part, a specific method is developed to simulate the process of adhesion based on a numerical description of surface roughness, on simplified modeling of adhesion forces due to van der Waals and capillary attraction and on non-linear constitutive modeling for polysilicon surfaces.
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References
de Boer MP, Michalske TA (1999) Accurate method for determining adhesion of cantilever beams. J Appl Phys 86:817–827
Bachmann D, Kuhne S, Hierold C (2006) Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function. Sens Actuat A 132:407–414
Basu S, Prabhakar A, Bhattacharya E (2007) Estimation of stiction force from electrical and optical measurements on cantilever beams. J Micro Nanolithogr MEMS MOEMS 16:629–634
Cho S-S, Park S (2004) Finite element modeling of adhesive contact using molecular potential. Tribol Int 37:763–769
Sauer RA (2010) A computational model for nanoscale adhesion between deformable solids and its application to gecko adhesion. J Adhes Sci Technol 24:1807–1818
Hariri A, Zu JW, Ben Mrad R (2007) Modeling of wet stiction in microelectro-mechanical systems (MEMS). J Micro Nanolithogr MEMS MOEMS 16:1276–1285
van Spengen WM, Puers R, De Wolf I (2002) A physical model to predict stiction in MEMS. J Micromech Microeng 12:702–713
DelRio F, de Boer M, Knapp J, Reedy E, Clews P, Dunn M (2005) The role of van der Waals forces in adhesion of micromachined surfaces. Nat Mater 4:629–634
Hu YZ, Tonder K (1992) Simulation of 3D random surfaces by 2D digital filters and Fourier analysis. Int J Mach Tools Manuf 32:83–90
Ardito R, Corigliano A, Frangi A (2010) Multiscale finite element models for predicting spontaneous adhesion in MEMS. Méc Ind 11:177–182
Ardito R, Corigliano A, Frangi A (2013) Modelling of spontaneous adhesion phenomena in micro-electro-mechanical systems. Eur J Mech 39:144–152
Israelachvili JN (2011) Intermolecular and surface forces, 3rd edn. Elsevier, Amsterdam
Acknowledgements
This work was partially funded by “Fondazione Cariplo” in 2009 within the project “Surface Interactions in Micro and Nano Devices”. The contribution of MIUR with the project PRIN09 “Multi-scale modeling of materials and structures” is also gratefully acknowledged.
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Ardito, R., Baldasarre, L., Corigliano, A. et al. Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS. Meccanica 48, 1835–1844 (2013). https://doi.org/10.1007/s11012-013-9767-y
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DOI: https://doi.org/10.1007/s11012-013-9767-y